CAJ | 학술논문

采用溶胶凝胶及后退火工艺制备云母基底的二氧化钒薄膜,采用XRD、SEM、FTIR及色差研究薄膜的性能.FTIR结果表明:在金属-半导体相变过程中,薄膜在红外光区的透过率变化为77％；变色性能显示相变时薄膜从低温的黄褐色变为高温黄绿色,色差△E*随温度的变化规律与光学开关性能类似,色差△E*在相变过程中的最大值为11.31.
채용용효응효급후퇴화공예제비운모기저적이양화범박막,채용XRD、SEM、FTIR급색차연구박막적성능.FTIR결과표명:재금속-반도체상변과정중,박막재홍외광구적투과솔변화위77％；변색성능현시상변시박막종저온적황갈색변위고온황록색,색차△E*수온도적변화규률여광학개관성능유사,색차△E*재상변과정중적최대치위11.31.
VO2 films on muscovite substrate were fabricated by inorganic sol-gel method and the following thermal treatment.The films were characterized by X-ray diffraction,scanning electron microscope (SEM),fourier transform infrared spectrophotometer (FTIR) and color difference (△E*).The FTIR result shows that the film has an infrared transmittance switching efficiency of 77％ in the metal-insulator transition.The color changing properties indicate that the film color reversibly changes from khaki to yellow-green as the temperature changes.The relationship between △E* and the temperature presents a hysteresis loop,which is in accordance with the infrared optical switching properties.The maximum of △E* during the film metal-insulator transition is 11.31.