CAJ | 학술논문

读出电路位于微传感器系统信号通路的最前端,是决定系统性能的关键因素.本文针对音叉式体硅微陀螺的具体应用,提出了一种低噪声电容读出电路,芯片采用斩波技术降低了电路的低频1/f噪声、失调电压以及参考电压失配的影响,提高了读出电路的分辨率和动态范围;提出一种噪声电荷转移的分析方法,用于分析和预测读出电路的噪声性能;建立一种简化的微陀螺传感器仿真模型,用于模拟读出电路对微传感器的响应.读出电路在0.35 μm 2P4 M 标准CMOS工艺下设计流片,并与微传感器进行了联合应用,芯片面积为2×2.5 mm~2,在5 V电源电压,100 kHz的时钟频率下,实现了4 aF/√HZ的电容分辨率和94 dB的动态范围.
독출전로위우미전감기계통신호통로적최전단,시결정계통성능적관건인소.본문침대음차식체규미타라적구체응용,제출료일충저조성전용독출전로,심편채용참파기술강저료전로적저빈1/f조성、실조전압이급삼고전압실배적영향,제고료독출전로적분변솔화동태범위;제출일충조성전하전이적분석방법,용우분석화예측독출전로적조성성능;건립일충간화적미타라전감기방진모형,용우모의독출전로대미전감기적향응.독출전로재0.35 μm 2P4 M 표준CMOS공예하설계류편,병여미전감기진행료연합응용,심편면적위2×2.5 mm~2,재5 V전원전압,100 kHz적시종빈솔하,실현료4 aF/√HZ적전용분변솔화94 dB적동태범위.
Readout circuit is a key factor determining the performance of MEMS gyroscope system, being at the forefront of the signal loop. This paper presents a low-noise readout circuit for a bulk micromachined tuning fork gyroscope. Using the chopper technique, the circuit can improve the resolution and dynamic range by canceling 1/f noise and offset of the amplifier, and mismatch between reference voltages. Theory predicting the resolution of the readout circuit is given which is based on noise charge transfer method. In order to simulate the response of the circuit with the vibrating gyroscope, a simplified time-varying capacitor model is also proposed. The chip measures 2×2.5 mm~2 in a standard 0.35 μm 2P4M CMOS process. Chip tests with the MEMS gyroscope prove the validity of the concepts proposed and show that the readout circuit achieves a resolution of 4 aF/√Hz with 94 dB dynamic range from a single 5 V supply.