光学精密工程
光學精密工程
광학정밀공정
OPTICS AND PRECISION ENGINEERING
2007年
12期
1886-1893
,共8页
朱京涛%王占山%王洪昌%张众%王风丽%秦树基%陈玲燕%崔明启%赵屹东%孙丽娟%周洪军%霍同林
硃京濤%王佔山%王洪昌%張衆%王風麗%秦樹基%陳玲燕%崔明啟%趙屹東%孫麗娟%週洪軍%霍同林
주경도%왕점산%왕홍창%장음%왕풍려%진수기%진령연%최명계%조흘동%손려연%주홍군%곽동림
偏振光学元件%多层膜%相移片%检偏器%极紫外%同步辐射
偏振光學元件%多層膜%相移片%檢偏器%極紫外%同步輻射
편진광학원건%다층막%상이편%검편기%겁자외%동보복사
polarization element%multilayer%phase retarder%polarimeter%extreme ultraviolet%synchrotron radiation
研究了极紫外宽带多层膜偏振光学元件,包括反射式检偏器与透射式相移片.基于Mo/Si非周期多层膜结构,采用解析与数值优化相结合的方法进行了多层膜的设计;采用磁控溅射技术制备了多层膜.利用X射线衍射仪对非周期多层膜的结构进行了表征,利用德国BESSY-Ⅱ同步辐射实验室的偏振测量仪对多层膜的偏振特性进行了测试.测量结果表明,在13～19 nm波段,s偏振分量的反射率高于15%;在15～17 nm波段,获得了37%的反射率.宽带多层膜同样可作为宽角偏振光学元件,在13.8～15.5 nm波段,宽带透射相移片的平均相移为41.7°.采用所研制的宽带多层膜相移片与检偏器,建立了宽带偏振分析系统,并对BESSY-Ⅱ的UE56/1 PGM1光束线的偏振特性进行了系统研究.这种宽带多层膜偏振光学元件可以极大地简化极紫外偏振测量.
研究瞭極紫外寬帶多層膜偏振光學元件,包括反射式檢偏器與透射式相移片.基于Mo/Si非週期多層膜結構,採用解析與數值優化相結閤的方法進行瞭多層膜的設計;採用磁控濺射技術製備瞭多層膜.利用X射線衍射儀對非週期多層膜的結構進行瞭錶徵,利用德國BESSY-Ⅱ同步輻射實驗室的偏振測量儀對多層膜的偏振特性進行瞭測試.測量結果錶明,在13～19 nm波段,s偏振分量的反射率高于15%;在15～17 nm波段,穫得瞭37%的反射率.寬帶多層膜同樣可作為寬角偏振光學元件,在13.8～15.5 nm波段,寬帶透射相移片的平均相移為41.7°.採用所研製的寬帶多層膜相移片與檢偏器,建立瞭寬帶偏振分析繫統,併對BESSY-Ⅱ的UE56/1 PGM1光束線的偏振特性進行瞭繫統研究.這種寬帶多層膜偏振光學元件可以極大地簡化極紫外偏振測量.
연구료겁자외관대다층막편진광학원건,포괄반사식검편기여투사식상이편.기우Mo/Si비주기다층막결구,채용해석여수치우화상결합적방법진행료다층막적설계;채용자공천사기술제비료다층막.이용X사선연사의대비주기다층막적결구진행료표정,이용덕국BESSY-Ⅱ동보복사실험실적편진측량의대다층막적편진특성진행료측시.측량결과표명,재13～19 nm파단,s편진분량적반사솔고우15%;재15～17 nm파단,획득료37%적반사솔.관대다층막동양가작위관각편진광학원건,재13.8～15.5 nm파단,관대투사상이편적평균상이위41.7°.채용소연제적관대다층막상이편여검편기,건립료관대편진분석계통,병대BESSY-Ⅱ적UE56/1 PGM1광속선적편진특성진행료계통연구.저충관대다층막편진광학원건가이겁대지간화겁자외편진측량.
Broadband Mo/Si muhilayer polarization optical elements were developed for the extreme ultraviolet(EUV)region,including a reflective analyzer and a transmission phase retarder.These multilayers were designed by a combined analytical/numerical method based on an aperiodic stack.Then these aperiodic multilayers were fabricated using direct-current magnetron sputtering technology.The multilayer structures were measured by an X-ray Diffractometer(XRD)working at the Cuthe Program for New Century Excellent Talents in University(No.NCET-04-0376).Ka line,and the polarization response Was characterized by the polarimeter on the UE56/1-PGM1 beamline at BESSY-Ⅱ,in Berlin.The measured s-polarized reflectivity is higher than 15% over the 13～19 nm wavelength range,and nearly constant s-reflectivity,up to 37%,is observed over the 15～17nm wavelength range.Furthermore,these aperiodic multilayers show high s-reflectivity and polarization over a wide angular range at fixed wavelength.The measured phase shift is 41.7°over the 13.8～15.5 nm wavelength range.Using an aperiodic transmission phase retarder and a reflection analyzer,a complete broadband polarization analysis system was developed.The polarization properties of the synchrotron radiation from the beamline UE56/1 PGM1 at BESSY-Ⅱ were systematically characterized in the 12.7～15.5 nm wavelength range by this newly developed broadband polarization analysis system.This kind of broadband multilayer polarizing elements can be used in EUV polarization measurements and will greatly simplify experimental arrangements.
