CAJ | 학술논문

本文在不同的溅射气压的情况下制备了具有相同结构参量的Mo/Si多层膜，测出了其对应的小角度X衍射曲线，在北京同步辐射实验室测量了多层膜的软X射线反射率.小角X射线衍射谱表明：随着溅射气压升高，多层膜的小角X射线衍射曲线的高次峰的峰高急剧变小，半峰宽变大.反射率测量结果也表明：多层膜的X射线反射率随溅射气压的升高而急剧降低.
본문재불동적천사기압적정황하제비료구유상동결구삼량적Mo/Si다층막，측출료기대응적소각도X연사곡선，재북경동보복사실험실측량료다층막적연X사선반사솔.소각X사선연사보표명：수착천사기압승고，다층막적소각X사선연사곡선적고차봉적봉고급극변소，반봉관변대.반사솔측량결과야표명：다층막적X사선반사솔수천사기압적승고이급극강저.
It is deposited Mo/Si multilayers on K9 glass using magnetron sputtering at different pressure of deposition gas and performed their small angle X-ray diffraction spectrum.A strong dependence between small angle X-ray diffraction spectrum and the pressure of deposition gas is found.