CAJ | 학술논문

采用晶格动力学蒙特卡罗(KLMC)方法模拟Ni在Ni(100)面的薄膜生长,对原子的沉积、吸附、扩散、成核、生长等微观过程采用了合理的模型,研究基板温度和沉积速率对薄膜的生长形貌和表面粗糙度的影响.模拟结果表明:沉积在基板上的原子逐步由各个离散型变成紧致型的近四方形的岛,并由二维向三维岛转变,最后连接成膜;基板温度越高,沉积速率越低,生成的薄膜越平整,粗糙度越小;沉积速率一定,表面粗糙度随着基板温度的增加而减小,当基板温度达到一定值时粗糙度降为零.
채용정격동역학몽특잡라(KLMC)방법모의Ni재Ni(100)면적박막생장,대원자적침적、흡부、확산、성핵、생장등미관과정채용료합리적모형,연구기판온도화침적속솔대박막적생장형모화표면조조도적영향.모의결과표명:침적재기판상적원자축보유각개리산형변성긴치형적근사방형적도,병유이유향삼유도전변,최후련접성막;기판온도월고,침적속솔월저,생성적박막월평정,조조도월소;침적속솔일정,표면조조도수착기판온도적증가이감소,당기판온도체도일정치시조조도강위령.
The growth of thin Ni film on Ni(100) has simulated by a three-dimensional kinetic lattice Monte Carlo simulation. With the logical model of the atom deposition,atom diffusion and atom growth,etc,the surface feature and surface roughness of Ni thin films have been studied. The results indicate that:many near square compact islands are formed gradually from the dispersive atoms on the surface at the early stage.With increasing deposition time,the film changed from the two-demensions to three-demensions.The higher the substrate temperature is and the lower the deposition rate is,the lower the surface roughness is.As the deposition rate remains unchanged,the surface roughness decreases with increasing substrate temperature. Moreover,the surface roughness becomes zero when the substrate temperature goes up to some value.