CAJ | 학술논문

生物定量检测中,生物样品是否均匀混合的研究意义重要.石英晶体微质量天平(QCM)因其振幅谐振机理,而具备优异的超声混合性能.本文结合微电子机械系统(MEMS)工艺,利用双面曝光、QCM预支撑和120℃长时间烘胶等改进方法,制备了尺寸可控、表面平整、结合紧密的SU-8芯片主体结构,利用聚二甲基硅氧烷(PDMS)封装获得完整的液相混合微芯片,最后利用罗丹明B荧光染料和SiO2纳米球对芯片的混合性能进行了表征.同时,本文提供了一种小体积、便捷、通用性好的液相混合微芯片的制备方法.
생물정량검측중,생물양품시부균균혼합적연구의의중요.석영정체미질량천평(QCM)인기진폭해진궤리,이구비우이적초성혼합성능.본문결합미전자궤계계통(MEMS)공예,이용쌍면폭광、QCM예지탱화120℃장시간홍효등개진방법,제비료척촌가공、표면평정、결합긴밀적SU-8심편주체결구,이용취이갑기규양완(PDMS)봉장획득완정적액상혼합미심편,최후이용라단명B형광염료화SiO2납미구대심편적혼합성능진행료표정.동시,본문제공료일충소체적、편첩、통용성호적액상혼합미심편적제비방법.
Uniform mixing of biological samples is important for quantitative detection.QCM(Quartz Crystal Microbalance)supports excellent ultrasonic ability for its amplitude resonance.An effective microchip based on QCM and SU-8 for solution mixing was reposed in this paper..The SU-8 main chip with controllable size,smooth surface and total binding,which was finally integrated with PDMS elastomer,was fabricated by improved MEMS technology,such as double-side exposure,pre-supporting of QCM and long time hard bake at 120℃.The mixing ability of this chip was characterized by Rhodamine B and SiO2 nano-spheres.This paper will contribute to fabrication of mixing chips which are small size,convenient to be used.effective and easy to be integrated with other functional microchips.