半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2005年
12期
2267-2270
,共4页
路秀真%刘峰奇%刘俊岐%金鹏%王占国
路秀真%劉峰奇%劉俊岐%金鵬%王佔國
로수진%류봉기%류준기%금붕%왕점국
量子级联激光器%分子束外延%激光器性能
量子級聯激光器%分子束外延%激光器性能
양자급련격광기%분자속외연%격광기성능
quantum cascade laser%molecular beam epitaxy%lasing performance
利用应变补偿和优化波导结构来提高量子级联激光器的性能,实现了波长为5.5μm量子级联激光器的室温激射.利用双晶X射线衍射实验对材料生长质量进行了检验.对于条宽为20μm,长为2mm的脊形波导激光器,室温最大输出功率为单腔面45mW.
利用應變補償和優化波導結構來提高量子級聯激光器的性能,實現瞭波長為5.5μm量子級聯激光器的室溫激射.利用雙晶X射線衍射實驗對材料生長質量進行瞭檢驗.對于條寬為20μm,長為2mm的脊形波導激光器,室溫最大輸齣功率為單腔麵45mW.
이용응변보상화우화파도결구래제고양자급련격광기적성능,실현료파장위5.5μm양자급련격광기적실온격사.이용쌍정X사선연사실험대재료생장질량진행료검험.대우조관위20μm,장위2mm적척형파도격광기,실온최대수출공솔위단강면45mW.
Room temperature operation is an important criterion for high performance of quantum cascade lasers. A strain-compensated quantum cascade laser(λ≈5.5μm) with optimized waveguide structure lasing at room temperature is reported. Accurate control of layer thickness and strain-compensated material composition is demonstrated using X-ray diffraction. An output power of at least 45mW per facet is realized for a 20μm-wide and 2mm-long laser at room temperature.