CAJ | 학술논문

在神经假体系统中,神经微电极是实现信号检测以及激励任务的重要组成部分.然而,神经微电极由于尺寸微小,往往具有很高的电极/组织界面阻抗.本文提出了一种在电极位点表面处集成纳米结构来增大电极有效表面积的方法.这种方法结合了光刻、局部氧化铝以及电子束蒸发等技术,在薄膜微电极的表面集成了纳米金柱结构.最后,本文测试和评价了此微电极的表面形貌以及电学性能.实验结果表明,这种集成有纳米金柱结构的微电极其界面阻抗降低了约25倍,促进了这种微电极在神经工程领域的广泛应用.
재신경가체계통중,신경미전겁시실현신호검측이급격려임무적중요조성부분.연이,신경미전겁유우척촌미소,왕왕구유흔고적전겁/조직계면조항.본문제출료일충재전겁위점표면처집성납미결구래증대전겁유효표면적적방법.저충방법결합료광각、국부양화려이급전자속증발등기술,재박막미전겁적표면집성료납미금주결구.최후,본문측시화평개료차미전겁적표면형모이급전학성능.실험결과표명,저충집성유납미금주결구적미전겁기계면조항강저료약25배,촉진료저충미전겁재신경공정영역적엄범응용.
In neural prosthetic systems, a low-impedance electrode-tissue interface is important for maintaining signal quality for recording and the effective charge transfer for stimulation. However, neural microelectrodes often have high impedance due to their small surface size. In this paper, a simple method for increasing the effective surface area by introducing nanostructures on the electrode sites has been presented. The method combines photolithography and electron-beam evaporation with a locally-patterned anodized porous alumina (APA) template to integrate Au-nanorod arrays on the thin-film microelectrode. The geometrical and electrical properties of the Au-nanorod electrodes have been evaluated and compared with the conventional planar microelectrodes. Experimental results show that approximately 25 times lower interface impedance has been achieved for this nanostructured microelectrode. Such Au-nanorod integrated microelectrode array is a promising tool for neural engineering.