中国有色金属学报(英文版)
中國有色金屬學報(英文版)
중국유색금속학보(영문판)
TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA
2011年
z2期
470-475
,共6页
解志文%王浪平%王小峰%黄磊%陆洋%闫久春
解誌文%王浪平%王小峰%黃磊%陸洋%閆久春
해지문%왕랑평%왕소봉%황뢰%륙양%염구춘
TiAlSiN%WS2%多层膜%摩擦因数%抗腐蚀
TiAlSiN%WS2%多層膜%摩抆因數%抗腐蝕
TiAlSiN%WS2%다층막%마찰인수%항부식
TiAlSiN%WS2%multilayer%friction coefficient%corrosion resistance
为了降低超硬TiAlSiN复合涂层的摩擦因数,采用多元等离子体浸没离子注入与沉积和射频(RF)磁控溅射技术制备TiAlSiN/WS2多层薄膜,利用XRD、SEM、Raman光谱、纳米探针、摩擦和电化学试验对薄膜的微结构、力学性能和腐蚀行为进行测试与分析.SEM结果表明:TiAlSiN/WS2多层薄膜具有清晰的调制周期.纳米硬度结果表明,TiAlSiN/WS2多层薄膜硬度介于TiAlSiN和WS2涂层硬度之间.摩擦实验结果证实TiAlSiN/WS2多层薄膜的摩擦大数低于TiAlSiN涂层的,且摩擦过程平稳.此外,TiAlSiN/WS2多层薄膜表现出良好的抗腐蚀能力,在相对较小的调制周期内,其腐蚀电流密度显著降低.
為瞭降低超硬TiAlSiN複閤塗層的摩抆因數,採用多元等離子體浸沒離子註入與沉積和射頻(RF)磁控濺射技術製備TiAlSiN/WS2多層薄膜,利用XRD、SEM、Raman光譜、納米探針、摩抆和電化學試驗對薄膜的微結構、力學性能和腐蝕行為進行測試與分析.SEM結果錶明:TiAlSiN/WS2多層薄膜具有清晰的調製週期.納米硬度結果錶明,TiAlSiN/WS2多層薄膜硬度介于TiAlSiN和WS2塗層硬度之間.摩抆實驗結果證實TiAlSiN/WS2多層薄膜的摩抆大數低于TiAlSiN塗層的,且摩抆過程平穩.此外,TiAlSiN/WS2多層薄膜錶現齣良好的抗腐蝕能力,在相對較小的調製週期內,其腐蝕電流密度顯著降低.
위료강저초경TiAlSiN복합도층적마찰인수,채용다원등리자체침몰리자주입여침적화사빈(RF)자공천사기술제비TiAlSiN/WS2다층박막,이용XRD、SEM、Raman광보、납미탐침、마찰화전화학시험대박막적미결구、역학성능화부식행위진행측시여분석.SEM결과표명:TiAlSiN/WS2다층박막구유청석적조제주기.납미경도결과표명,TiAlSiN/WS2다층박막경도개우TiAlSiN화WS2도층경도지간.마찰실험결과증실TiAlSiN/WS2다층박막적마찰대수저우TiAlSiN도층적,차마찰과정평은.차외,TiAlSiN/WS2다층박막표현출량호적항부식능력,재상대교소적조제주기내,기부식전류밀도현저강저.
To reduce the friction coefficient of the superhard TiAlSiN composite coating,TiAlSiN/WS2 multilayers were synthesized by multiple plasma immersion ion implantation and deposition as well as radio-frequency (RF) magnetron sputtering.X-ray diffraction (XRD),scanning electron microscopy (SEM),Raman spectrum,nano indentation,tribological and electrochemical tests were employed to characterize the microstructure,mechanical properties and corrosion behavior of the as-deposited multilayers.SEM results reveal that the TiAlSiN/WS2 multilayers have a good periodicity.Nano indentation results show that the nanohardness of TiAlSiN/WS2 multilayers is between that of the TiAlSiN and WS2 coatings.Tribological tests prove that the friction coefficient of the TiAlSiN/WS2 multilayers is lower and more stable than that of the TiAlSiN coating.In addition,the TiAlSiN/WS2 multilayers show excellent corrosion resistance and the corrosion current density decreases obviously at a relative small modulation period.