多元等离子体浸没离子注入与沉积和磁控溅射技术制备TiAlSiN/WS2多层薄膜的力学性能和腐蚀行为
다원등리자체침몰리자주입여침적화자공천사기술제비TiAlSiN/WS2다층박막적역학성능화부식행위
Mechanical performance and corrosion behavior of TiA1SiN/WS2 multilayer deposited by multi-plasma immersion ion implantation and deposition and magnetron sputtering
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