CAJ | 학술논문

构造强电负性等离子体中平板电极处鞘层形成的模型,使用流体动力学方程组研究等离子体鞘层.得到空间电势、空间静电荷分布和鞘层宽度作为距离函数的数值结果.结果表明,强电负性鞘层中,在等离子体区和鞘层区之间几乎没有过渡的预鞘区,在靠近极板附近鞘层里的电子、负离子和正离子的分布形成一个纯正离子鞘区.在靠近鞘边附近,空间静电荷密度分布有一个很尖的峰.发现同电正性情形相比,强电负性鞘层的宽度要窄很多,空间电势下降得快得多.
구조강전부성등리자체중평판전겁처초층형성적모형,사용류체동역학방정조연구등리자체초층.득도공간전세、공간정전하분포화초층관도작위거리함수적수치결과.결과표명,강전부성초층중,재등리자체구화초층구지간궤호몰유과도적예초구,재고근겁판부근초층리적전자、부리자화정리자적분포형성일개순정리자초구.재고근초변부근,공간정전하밀도분포유일개흔첨적봉.발현동전정성정형상비,강전부성초층적관도요착흔다,공간전세하강득쾌득다.
A model of sheath formation on a planar electrode in strongly electronegative plasmas is presented.The plasma sheath is studied by using a set of hydrodynamic equations.Spatial potential,net space charge distributions and sheath width as functions of distance are obtained.It shows that in a strongly electronegative sheath a presheath between bulk plasma and sheath hardly exist,and electrons,negative and positive ions in the sheath form a pure positive ion sheath near boundary of electrode.Density of net space charge has a sharp peak near the sheath edge.Compared with an electropositive sheath,it is found that the width of strongly electronegative sheath is much narrower,and the spatial potential within the sheath falls much faster.