CAJ | 학술논문

为开发大尺寸场发射显示器需要的能承受高温热处理的薄膜电极,以Al作为Ag层的保护层和与玻璃衬底的粘附层,采用直流磁控溅射制备了Al/Ag/Al复合薄膜及其电极.采用XRD、AFM、光学显微镜和电性能测试系统,研究不同温度热处理对复合薄膜和电极结构、表面形貌和电性能的影响.由于表面致密的Al2O3膜的保护,使得加热退火(<600℃)不会对Al/Ag/Al薄膜和电极造成明显的氧化,然而Al层与Ag层发生的界面扩散和固相反应增大了电极的电阻率(从5.0×10~(-8) Ω·m 上升至23.6×10~(-8) Ω·m).另外热处理温度足够高时(500℃、600℃),Ag原子向表面的扩散一定程度上降低了电极的化学稳定性.尽管如此,与Cr/Cu/Cr薄膜电极相比Al/Ag/Al薄膜电极仍然是一种能够承受高温热处理并且保持较低电阻率的新型电极.
위개발대척촌장발사현시기수요적능승수고온열처리적박막전겁,이Al작위Ag층적보호층화여파리츤저적점부층,채용직류자공천사제비료Al/Ag/Al복합박막급기전겁.채용XRD、AFM、광학현미경화전성능측시계통,연구불동온도열처리대복합박막화전겁결구、표면형모화전성능적영향.유우표면치밀적Al2O3막적보호,사득가열퇴화(<600℃)불회대Al/Ag/Al박막화전겁조성명현적양화,연이Al층여Ag층발생적계면확산화고상반응증대료전겁적전조솔(종5.0×10~(-8) Ω·m 상승지23.6×10~(-8) Ω·m).령외열처리온도족구고시(500℃、600℃),Ag원자향표면적확산일정정도상강저료전겁적화학은정성.진관여차,여Cr/Cu/Cr박막전겁상비Al/Ag/Al박막전겁잉연시일충능구승수고온열처리병차보지교저전조솔적신형전겁.
In order to develop new oxidation resistant electrode for large screen FED panels, a novel Al/Ag/Al (60 nm/660 nm/60 nm) thin film electrode was fabricated by DC magnetron sputtering, in which Al layer was applied as both protective layer and adhesion layer of Ag layer. Different techniques, such as XRD, AFM, optical microscopy and electric measurement were utilized to study the crystal structure, surface morphology and electric conduction of as-prepared and annealed samples treated at different temperatures. Due to the protection of dense Al_2O_3 layer, no significant oxidation was observed even after annealing at 600℃. However, electric resistivity was elevated as high sa 23.6×10~(-8)Ω·m due to diffusion and reaction between Al and Ag atoms. Nonetheless, comparing with Cr/Cu/Cr electrode the Al/Ag/Al is a new oxidation resistant electrode that can with stand high temperature treatment process.