CAJ | 학술논문

光刻工艺中对热板表面温度场均匀性有极高要求,在热板设计参数选择问题上,通过使用通用旋转组合设计的方法,利用ANSYS仿真模拟软件,得到不同设计参数情况下的热板表面温度场均匀性数据。对仿真结果数据进行回归建模,回归模型计算结果与仿真结果有较高的一致性。结果表明,热板设计参数可以根据该回归模型来选择。
광각공예중대열판표면온도장균균성유겁고요구,재열판설계삼수선택문제상,통과사용통용선전조합설계적방법,이용ANSYS방진모의연건,득도불동설계삼수정황하적열판표면온도장균균성수거。대방진결과수거진행회귀건모,회귀모형계산결과여방진결과유교고적일치성。결과표명,열판설계삼수가이근거해회귀모형래선택。
In lithography process,there is very high requirements to the temperature uniformity of hot plate surface,and for the problem of choosing design parameters,a general rotary unitized design method was used,the simulation software ANSYS was applied,the data of the temperature uniformities of hot plate surface were obtained when the design parameters were selected for different values.It is consistent between the results of regressive model and the simulation ones.So hot plate parameters can be selected according to this regressive model.