CAJ | 학술논문

利用频闪成像和显微干涉技术设计开发了微机电系统(Micro Electro Mechanical Systems,MEMS)离面微运动测试系统.系统在计算机控制下通过相对延时和五步相移干涉技术自动采集MEMS结构运动周期内各不同时刻的干涉条纹图集,再通过五步相移算法和分割线去包裹算法分别对干涉条纹图和包裹相位图进行分析处理可得到被测MEMS结构的离面微运动情况.为实现浮点型相位图数据的有效存取,提出了一种新的相位图文件格式.通过实验对硅微悬臂梁在不同幅值正弦基础激励下的离面振动响应进行了有效测量,且测量重复性误差小于10nm.
이용빈섬성상화현미간섭기술설계개발료미궤전계통(Micro Electro Mechanical Systems,MEMS)리면미운동측시계통.계통재계산궤공제하통과상대연시화오보상이간섭기술자동채집MEMS결구운동주기내각불동시각적간섭조문도집,재통과오보상이산법화분할선거포과산법분별대간섭조문도화포과상위도진행분석처리가득도피측MEMS결구적리면미운동정황.위실현부점형상위도수거적유효존취,제출료일충신적상위도문건격식.통과실험대규미현비량재불동폭치정현기출격려하적리면진동향응진행료유효측량,차측량중복성오차소우10nm.
A measurement system for out-of-plane micro-motions of MEMS structures is developed based on stroboscopic imag-ing and microscopic interferometry techniques,and it can automatically acquire intederograms at different time in moving periods of MEMS structures with relative-time delay method and five-step-phase-shift interferometry.Out-of-plane motions of MEMS structures can be gained from interferograms and wrapped phase maps by five-step-phase-shift algorithm and branch-cut un-wrapping algorithms.A new fde format is defined for saving and reading the float style data of phase map effectively.The out-of-plane librations of a si-micro-cantilever under different amplitude sine-base-excitation are efficiently tested,and the error of measurement repeatability for out-of-plane micro-motions is less than 10 nm.