CAJ | 학술논문

利用射频磁控溅射方法,在石英表面上制备了具有良好的c轴取向的纳米ZnO薄膜.室温下,在300 nm激发下,在450 nm附近观测到ZnO薄膜的蓝光发射谱(430～460 nm).分析了气氛中氧气与氩气比对薄膜质馈及蓝光发射光谱的影响,给出了纳米ZnO薄膜光敛发光谱(PL)的积分强度和峰值强度与氧氩比关系.探讨了纳米ZnO薄膜的蓝光光谱的发射机制,初步证实了ZnO蓝光发射(2.88～2.69 Ev)来自氧空位(V_O)形成的浅施主能级上的电子至价带顶的跃迁.
이용사빈자공천사방법,재석영표면상제비료구유량호적c축취향적납미ZnO박막.실온하,재300 nm격발하,재450 nm부근관측도ZnO박막적람광발사보(430～460 nm).분석료기분중양기여아기비대박막질궤급람광발사광보적영향,급출료납미ZnO박막광렴발광보(PL)적적분강도화봉치강도여양아비관계.탐토료납미ZnO박막적람광광보적발사궤제,초보증실료ZnO람광발사(2.88～2.69 Ev)래자양공위(V_O)형성적천시주능급상적전자지개대정적약천.
Nanocrystalline ZnO films were deposited on quartz substrates by radio-frequency magnetron sputtering (RFMS) method.The authors discussed the effect caused by the change in the ratio of oxygen to argon and quartz substrates temperature on the qualities of thin films and blue photoluminescence spectrum of ZnO films.Relationship between XRD intensity and FWHM of nanocrystalline ZnO films at different ratio of O_2/Ar in processing was given.Photoluminescence spectrum (PL),absorption spectra (ABS),photoluminescence excitation spectrum (PLE) and X-ray diffraction pattern (XRD) of nanocrystalline ZnO film with excitation wavelength 300 nm were measured at room temperature.XRD pattern indicates that nanocrystalline ZnO film has a hexagonal wurtzite structure and is polycrystalline.Blue visible emission bands (430-460 nm) were observed,and its central wavelength is 445 nm.The relationship between PL area of integration and PL intensity of maximum of nanocrystalline ZnO films at different ratio of O_2/Ar in processing was given.The luminescence emission peak located at 450 nm corresponds to the transition from the shallow level of oxygen vacancy to valence band or the interstitial.