云南民族学院学报(自然科学版)
雲南民族學院學報(自然科學版)
운남민족학원학보(자연과학판)
JOURNAL OF YUNNAN UNIVERSITY OF THE NATIONALITIES
2001年
2期
326-328
,共3页
小角X射线衍射%磁控溅射%Si/Co多层膜
小角X射線衍射%磁控濺射%Si/Co多層膜
소각X사선연사%자공천사%Si/Co다층막
Small angle X-ray diffraction%Magnetron sputtering%Si/Co multilayer thin films
用小角X射线衍射方法对Si/Co多层膜进行了测试研究,应用衍射理论对测试中出现的周期数不多的强峰和其间的一系列次强峰进行了分析,在计算多层和单层膜厚度时,提出利用相邻两个衍射峰的角度之差来消除系统误差和定位误差的简便方法,使数据处理得到简化.最后,通过XPS分析指出,在膜层界面具有硅的化合物存在.
用小角X射線衍射方法對Si/Co多層膜進行瞭測試研究,應用衍射理論對測試中齣現的週期數不多的彊峰和其間的一繫列次彊峰進行瞭分析,在計算多層和單層膜厚度時,提齣利用相鄰兩箇衍射峰的角度之差來消除繫統誤差和定位誤差的簡便方法,使數據處理得到簡化.最後,通過XPS分析指齣,在膜層界麵具有硅的化閤物存在.
용소각X사선연사방법대Si/Co다층막진행료측시연구,응용연사이론대측시중출현적주기수불다적강봉화기간적일계렬차강봉진행료분석,재계산다층화단층막후도시,제출이용상린량개연사봉적각도지차래소제계통오차화정위오차적간편방법,사수거처리득도간화.최후,통과XPS분석지출,재막층계면구유규적화합물존재.
small-angle x-ray diffraction study on Si/Co multilayer thin films has been undertaken . The big diffraction peaks of multilayer thin films with a less number of periods and a numbers of satellite peaks between the big peaks has been analyzed bydiffraction theory.
For calculating the thickness of multilayer and single layer films,a simple method with angles-difference of adjacent peaks was presented,which reduced system error and located deviation and made data process simple. Also, The chemical state in Si/Co interface was analyzed by XPS . The results showed that therewere silicide there.