CAJ | 학술논문

采用真空蒸镀法在SiO2表面制备非晶态碳纳米薄膜,考察了碳离子注入对非晶态碳薄膜与基体结合强度及摩擦学性能的影响，并采用X射线光电子能谱表征了碳薄膜/基体的界面化学状态.研究结果表明：非晶态碳薄膜经碳离子注入处理后,碳薄膜与基体的结合强度及其耐磨寿命均明显提高；当碳离子注入剂量达到1×1016 C+/cm2时，碳薄膜与基体的结合强度增加,但碳薄膜耐磨寿命的提高幅度有限；当注入剂量达到并超过5×1016 C+/cm2后，碳离子注入所引起的碰撞混合和化学混合作用直接导致碳薄膜与SiO2基体界面处的原子扩散以及Si-C键的形成，从而大幅提高碳薄膜与基体的结合强度及其耐磨寿命.
채용진공증도법재SiO2표면제비비 정태탄납미박막,고찰료탄리자주입대비정태탄박막여기체결합강도급마찰학성능적영향， 병채용X사선광전자능보표정료탄박막/기체적계면화학상태.연구결과표명：비정태탄박막 경탄리자주입처리후,탄박막여기체적결합강도급기내마수명균명현제고；당탄리자주입제 량체도1×1016 C+/cm2시，탄박막여기체적결합강도증가,단탄박막내마수명적 제고폭도유한；당주입제량체도병초과5×1016 C+/cm2후，탄리자주입소인기적 팽당혼합화화학혼합작용직접도치탄박막여SiO2기체계면처적원자확산이급Si-C건적형 성，종이대폭제고탄박막여기체적결합강도급기내마수명.
The effect of ion mixing by C+ implantation on the tribological behavior and adhesion strength of amorphous carbon film on SiO 2 substrate was investigated by means of ball-on-disc friction and wear test ing and X-ray photoelectron spectroscopic analysis of the film/substrate interf ace. The results show that the anti-wear life and adhesion strength of amorphou s carbon films on SiO2 substrate are significantly increased by C+ ion impla ntation, especially at a dose of C+ ion 1×1017C/cm2. The improvement in the adhesion strength and antiwear life of the amorphous carbon film on SiO 2 substrate is attributed to the atomic diffusion and chemical changes at the fi lm/substrate interface in the presence of C+ ion implantation. Especially, Si -C of high mechanical strength and good wear-resistance is formed at the inter face after C+ ion implantation of the amorphous carbon film at relatively high doses, which contributes to resist wear after partial destruction of the amorph ous carbon film at extended sliding duration.