催化学报
催化學報
최화학보
CHINESE JOURNAL OF CATALYSIS
2006年
6期
465-467
,共3页
郑建华%周锦兰%俞开潮%葛学贵%于澍燕
鄭建華%週錦蘭%俞開潮%葛學貴%于澍燕
정건화%주금란%유개조%갈학귀%우주연
催化剂增强化学气相沉积%聚酰亚胺%铂膜%钯-铂双层膜
催化劑增彊化學氣相沉積%聚酰亞胺%鉑膜%鈀-鉑雙層膜
최화제증강화학기상침적%취선아알%박막%파-박쌍층막
catalyst-enhanced chemical vapor deposition%polyimide%platinum film%palladium-platinum bilayer film
以N2和O2为载气,采用催化剂增强化学气相沉积法于聚酰亚胺上获得了Pt和Pd-Pt双层金属薄膜. 当使用Pd(hfac)2和PtMe2(COD)为前驱体,在同一反应器内共沉积时,只有Pt被沉积. 金属Pd和Pt顺序沉积可形成Pd-Pt双层膜.
以N2和O2為載氣,採用催化劑增彊化學氣相沉積法于聚酰亞胺上穫得瞭Pt和Pd-Pt雙層金屬薄膜. 噹使用Pd(hfac)2和PtMe2(COD)為前驅體,在同一反應器內共沉積時,隻有Pt被沉積. 金屬Pd和Pt順序沉積可形成Pd-Pt雙層膜.
이N2화O2위재기,채용최화제증강화학기상침적법우취선아알상획득료Pt화Pd-Pt쌍층금속박막. 당사용Pd(hfac)2화PtMe2(COD)위전구체,재동일반응기내공침적시,지유Pt피침적. 금속Pd화Pt순서침적가형성Pd-Pt쌍층막.
Catalyst-enhanced chemical vapor deposition of Pt and Pd-Pt bilayer films on polyimide using N2 and O2 as the carrier gases was studied. When the mixture of Pt complex and Pd complex was used as precursors in the same chamber for co-deposition of Pd and Pt, only Pt was deposited. Sequential deposition of Pd and Pt metals formed Pd-Pt bilayer films.
