CAJ | 학술논문

为了制作局部为三维结构的金属模具微型腔,实验研究了一种组合加工新工艺,即先用紫外线光刻和电铸成形(准LIGA)技术在模具基底上制作二维金属微型腔,再用微细电火花成形加工(EDM)技术对微型腔的局部进行修形,得到局部为三维结构的微型腔,电火花修形的位置根据微型腔结构的设计要求而定.以制作聚合物微流控芯片用的金属模具为试件,以微细电火花成形加工中影响工件表面粗糙度的因素分析为理论指导,应用该方法制作了局部侧壁倾斜的三维微型腔.根据测量结果,两边侧壁与水平方向的夹角分别为49.6°和46.4°,倾斜侧壁的表面粗糙度R_a为0.391μm.
위료제작국부위삼유결구적금속모구미형강,실험연구료일충조합가공신공예,즉선용자외선광각화전주성형(준LIGA)기술재모구기저상제작이유금속미형강,재용미세전화화성형가공(EDM)기술대미형강적국부진행수형,득도국부위삼유결구적미형강,전화화수형적위치근거미형강결구적설계요구이정.이제작취합물미류공심편용적금속모구위시건,이미세전화화성형가공중영향공건표면조조도적인소분석위이론지도,응용해방법제작료국부측벽경사적삼유미형강.근거측량결과,량변측벽여수평방향적협각분별위49.6°화46.4°,경사측벽적표면조조도R_a위0.391μm.
A combined process to fabricate micro metal mold cavity with local three-dimension (3D) structure was studied in the experiment.First,a two-dimension (2D) microstructure was fabricated on the metal plate with ultraviolet-lithographie,galvanoformung,abformung (UV-LIGA) technology.Then the 2D microstructure was transformed into 3D figure with micro electro-discharge machining (EDM)technology in the parts according to the design.Based on analysis of the factors influencing the surface roughness in micro EDM,a 3D micro mold cavity with slope sides locally was fabricated in the Ni mold of polymer microfluidic chip.Measuring results show that the angles of the two slope sides are 49.6° and 46.4°,respectively,and the surface roughness R_a of the slope sides is 0.391 μm.