CAJ | 학술논문

为协调有效地利用频闪成像、显微视觉和相移干涉技术实现微机电系统(MEMS,micro-electro-mechanical systems)微运动的可靠测量,提出了一种改进的协调同步控制方法,该方法通过2块5 MHz频率的任意波形发生卡实现激光二极管(LD,laser diode)脉冲信号和MEMS激励信号的同频率相对延时,最小延时增量可达0.3 ns,最小脉冲宽度可达10 ns.基于该方法构建的测试系统可实现MEMS的离面(out-of-plane)和面内(in-plane)微运动的自动测量.通过对硅微悬臂梁离面振动以及硅微谐振器阵列面内振动的实验测量验证了新协调同步控制方法的有效性和实用性,其中离面微运动测量重复性误差小于10 nm,面内微运动测量重复性误差小于25 nm.
위협조유효지이용빈섬성상、현미시각화상이간섭기술실현미궤전계통(MEMS,micro-electro-mechanical systems)미운동적가고측량,제출료일충개진적협조동보공제방법,해방법통과2괴5 MHz빈솔적임의파형발생잡실현격광이겁관(LD,laser diode)맥충신호화MEMS격려신호적동빈솔상대연시,최소연시증량가체0.3 ns,최소맥충관도가체10 ns.기우해방법구건적측시계통가실현MEMS적리면(out-of-plane)화면내(in-plane)미운동적자동측량.통과대규미현비량리면진동이급규미해진기진렬면내진동적실험측량험증료신협조동보공제방법적유효성화실용성,기중리면미운동측량중복성오차소우10 nm,면내미운동측량중복성오차소우25 nm.
An improved harmonious-synchronous-control method is proposed to reliably measure micro-motions of MEMS with stroboscopic imaging,microvision and phase-shift interferometry technologies.This method can realize the relative timing of the LD pulse train and the MEMS-drive waveform at a same frequency by two 5 MHz function generators,and the time-lapse increase is less than 0.3 as,and the least pulse width is 10 ns.The measurement system based on this method can automatically test out-of-plane and in-plane micro-motions of MEMS.The experimental work conducted on Si micro-cantilevers and Si micro-resonator-arrays confirms that such a measurement system based on the new harmonious-synchronous-control method is effective and efficient to characterize micro-motions of MEMS.The error of measurement repeatability for out-of-plane micro-motions is less than10 nm,and the error of measurement repeatability for in-plane micro-motions is less than 25 nm.