CAJ | 학술논문

保持150℃的衬底温度不变,通过调节氧氩比 (OFR=[O_2]/[Ar]),利用直流反应磁控溅射技术在玻璃衬底上制备了一系列氧化银薄膜.利用X射线衍射谱、扫描电子显微镜和分光光度计重点研究了薄膜的微结构对其反射率和透射率的影响.研究表明随着OFR的升高,氧化银薄膜呈现了从Ag+Ag_2O多晶结构到Ag_2O多晶结构的演变.薄膜的表面相应地呈现了从疏松的多孔结构到类金字塔结构的演变.较高的Ag_2O含量和致密的表面形貌有利于薄膜可见和红外区的透光性,而较高的银含量和疏松的多孔结构则造成对光的强烈吸收,急剧地降低了薄膜的透射率和反射率.特别是在OFR为0.5条件下成功制备了具有(111)择优取向的Ag_2O多晶薄膜,有效地将氧化银热分解的临界温度降低到200℃左右.
보지150℃적츤저온도불변,통과조절양아비 (OFR=[O_2]/[Ar]),이용직류반응자공천사기술재파리츤저상제비료일계렬양화은박막.이용X사선연사보、소묘전자현미경화분광광도계중점연구료박막적미결구대기반사솔화투사솔적영향.연구표명수착OFR적승고,양화은박막정현료종Ag+Ag_2O다정결구도Ag_2O다정결구적연변.박막적표면상응지정현료종소송적다공결구도류금자탑결구적연변.교고적Ag_2O함량화치밀적표면형모유리우박막가견화홍외구적투광성,이교고적은함량화소송적다공결구칙조성대광적강렬흡수,급극지강저료박막적투사솔화반사솔.특별시재OFR위0.5조건하성공제비료구유(111)택우취향적Ag_2O다정박막,유효지장양화은열분해적림계온도강저도200℃좌우.
The silver oxides films were deposited by DC reactive magnetron sputtering on glass substrates.The impacts of the film growth conditions,including the ratio of O_2/Ar flow rates and substrate temperature,on the properties of the films were studied. The microstructures and properties of the films were characterized with X-ray diffraction,scanning electron microscopy and spectrophotometer.The results show that the ratio of O_2/Ar flow rates significantly affects its microstructures,pyrolysis temperature and optical properties.For instance,as the ratio increases,the amorphous Ag and Ag_2O clusters gradually turns into Ag_2O polycrystalline grains,and the surface morphology also changed.Interesting finding is that at a O_2/Ar flow-rate ratio of 0.5,the Ag_2O polycrystalline films with (111) preferred orientation,has a critical pyrolysis temperature lower than 200℃.