CAJ | 학술논문

大型高功率固体激光装置通常要求总的打靶精度为几十微米,这对结构的稳定性设计提出了很高的要求.本文以一大型激光装置为背景,以关键光机系统为例进行稳定性设计.通过采用钢筋混凝土建筑结构、一体化结构和桁架结构、隔离振动源增加结构刚度等方式减小光机结构对环境振动的响应,提高结构的稳定性.然后,应用有限元理论对关键光学元件及其支撑结构的稳定性进行分析,以验证光机结构设计的合理性.分析结果显示,该系统中腔镜的最大转角为0.14 μrad,注入系统角漂元件的最大转角为0.423 μrad,光束切换模块反射镜的最大转角为0.394 μrad.计算结果表明:设计的结构合理可行,关键光学元件均满足稳定性设计指标的要求,且裕度系数＞1.5.
대형고공솔고체격광장치통상요구총적타파정도위궤십미미,저대결구적은정성설계제출료흔고적요구.본문이일대형격광장치위배경,이관건광궤계통위례진행은정성설계.통과채용강근혼응토건축결구、일체화결구화항가결구、격리진동원증가결구강도등방식감소광궤결구대배경진동적향응,제고결구적은정성.연후,응용유한원이론대관건광학원건급기지탱결구적은정성진행분석,이험증광궤결구설계적합이성.분석결과현시,해계통중강경적최대전각위0.14 μrad,주입계통각표원건적최대전각위0.423 μrad,광속절환모괴반사경적최대전각위0.394 μrad.계산결과표명:설계적결구합리가행,관건광학원건균만족은정성설계지표적요구,차유도계수＞1.5.
Large high-power solid-state laser facilities have a very high requirement for the total positioning error budget(<50 μm in general),so it is a very important to improve the stability of structure design.In this paper,the stability design is illustrated for several key optical and mechanical systems in the large laser facility.Then,several kinds of methods,such as reinforced concrete supports,truss structures,vibration isolation,integrated design and inhencing structure rigidness are used to reduce the effect of optical and mechanical structures on the ambient vibration and to improve the structure stablility,and finite element models are established to analyse the stablility of the key optical elements and support structures and to verify that the structure design is reasonable or not.The results show that the maximum rotation angles of key optical elements,i.e.cavity mirrors,Injection Mirror (IM),and the mirror in beam switch module are 0.14,0.423,and 0.394 jurad,respectively,and their design margins are greater than 1.5.These results indicate that the optical elements and support structures can satisfy the design indices for stability.