CAJ | 학술논문

为解决微泵截止性低和回流等问题,利用有限元分析法,建立了微小型圆形压电单晶片驱动式主动阀的结构数学模型,分析了阀口厚度和阀口间隙对阀腔内流场分布和压强损耗的影响,为优化圆形单晶片驱动式微小型主动阀泵的结构提供了依据.并且利用自身设计制作的圆形单晶片驱动式微小型主动阀压电泵(直径35 mm)进行了分析验证.结果表明,在阀口厚度一定时,随着电压的升高,压电振子的振幅增大,主动阀的截止性升高,回流减少,流量升高.当阀口厚度为200 μm、阀口间隙为30 μm、电压为150 V时,其流量达到38 mL/min.
위해결미빙절지성저화회류등문제,이용유한원분석법,건립료미소형원형압전단정편구동식주동벌적결구수학모형,분석료벌구후도화벌구간극대벌강내류장분포화압강손모적영향,위우화원형단정편구동식미소형주동벌빙적결구제공료의거.병차이용자신설계제작적원형단정편구동식미소형주동벌압전빙(직경35 mm)진행료분석험증.결과표명,재벌구후도일정시,수착전압적승고,압전진자적진폭증대,주동벌적절지성승고,회류감소,류량승고.당벌구후도위200 μm、벌구간극위30 μm、전압위150 V시,기류량체도38 mL/min.
In order to resolve low cut-off and back flow of the micropump,finite element analysis was used to set up the mathematical model of a circular piezoelectric-driven unimorph micropump structure with active valve and analyze the influence of the valve port thickness and valve port gap on cavity flow field distribution and the pressure loss, providing the basis of the structure to optimize circular piezoelectric-driven unimorph micropump with active valve. Moreover, micro valve piezoelectric pump (diameter of 35 mm) was designed and fabricated by use of the circular unimorph for verification. Results show that the retardarce of active valve tends to be enhanced with larger amplitude of piezoelectric vibrator and higher voltage when the thickness value is fixed, causing the reflux decreasing, and the flux increasing. When valve port thickness was 200 μm, valve port gap was 30 μm, voltage was 150 V, the flux reached 38 mL/min.