CAJ | 학술논문

采用射频磁控溅射法制备了锐钛矿相TiO2薄膜,在基片温度、溅射功率、溅射时间以及靶材与基片间的距离等因素不变的情况下,研究不同氩氧分压比对薄膜亲水性能的影响。通过原子力显微镜（AFM）、X射线衍射光谱（XRD）表征了薄膜的微观表面形貌和晶相组成,采用静态接触角（SCA）评估薄膜的亲水性。实验结果表明不同氩氧比制备的锐钛矿相TiO2薄膜,紫外光照12 h后,接触角降到10o左右,而氩氧比小于等于5：5的接触角都低至5o左右,达到了超亲水性。氩氧分压比为4：6时,样品薄膜的光致亲水性最佳且光照后亲水性的保持较长。
채용사빈자공천사법제비료예태광상TiO2박막,재기편온도、천사공솔、천사시간이급파재여기편간적거리등인소불변적정황하,연구불동아양분압비대박막친수성능적영향。통과원자력현미경（AFM）、X사선연사광보（XRD）표정료박막적미관표면형모화정상조성,채용정태접촉각（SCA）평고박막적친수성。실험결과표명불동아양비제비적예태광상TiO2박막,자외광조12 h후,접촉각강도10o좌우,이아양비소우등우5：5적접촉각도저지5o좌우,체도료초친수성。아양분압비위4：6시,양품박막적광치친수성최가차광조후친수성적보지교장。
TiO2 anatase thin film was prepared by radio frequency magnetron sputtering method.The TiO2 thin film＇s hydrophilicity influenced by oxygen partial pressure was studied when the other technological parameters remained the same,such as substrate temperature,sputtering power,sputtering time and the distance between the sputtering target and the substrate.The surface morphology,crystalline phase and hydrophicity were characterized by atomic force microscope（AFM）,X-ray diffraction spectrum（XRD） and static contact angle（SCTA）,respectively.The results indicate that the prepared TiO2 thin films show the photo-induced hydropholicity after 12 hours irradiation of ultraviolet ray,and it is the best when the ratio between argon and oxygen is 4：6.