材料导报
材料導報
재료도보
MATERIALS REVIEW
2009年
22期
48-51
,共4页
闫海乐%茹红强%喻亮%里景阳%魏文韬%岳新艳
閆海樂%茹紅彊%喻亮%裏景暘%魏文韜%嶽新豔
염해악%여홍강%유량%리경양%위문도%악신염
溶胶-凝胶法%真空浸渍法%Al_2O_3%薄膜%三维网络碳化硅%抗热震性
溶膠-凝膠法%真空浸漬法%Al_2O_3%薄膜%三維網絡碳化硅%抗熱震性
용효-응효법%진공침지법%Al_2O_3%박막%삼유망락탄화규%항열진성
Sol-gel method%vacuum impregnation method%Al_2O_3 thin film%three-dimensional silicon carbide%thermal shock resistance
以无机盐Al(NO_3)_3·9H_2O为先驱体、水为溶剂,加入不同浓度的胶溶剂HNO_3,采用溶胶-凝胶(Solgel)法制备了勃姆石(γ-AlOOH)溶胶.分别以溶液下降法和真空浸渍法在三维网络碳化硅陶瓷骨架(3D-SiC)表面浸涂γ-AlOOH溶胶,采用不同烧结制度在3D-SiC表面生成了Al_2O_3薄膜.采用X射线衍射仪(XRD)、红外光谱仪(IR)和扫描电子显微镜(SEM)分析了薄膜的物相和显微结构,并检测了薄膜的抗热震性.结果表明,采用真空浸渍法在3D-SiC表面浸涂加入浓度0.22mol/L HNO_3制备的γ-AlOOH溶胶能烧结形成致密平整的Al_2O_3薄膜.升高烧结温度,Al_2O_3晶粒长大,900℃时薄膜最致密且能观测到玻璃态显微结构.薄膜的抗热震性随烧结温度升高而提高.
以無機鹽Al(NO_3)_3·9H_2O為先驅體、水為溶劑,加入不同濃度的膠溶劑HNO_3,採用溶膠-凝膠(Solgel)法製備瞭勃姆石(γ-AlOOH)溶膠.分彆以溶液下降法和真空浸漬法在三維網絡碳化硅陶瓷骨架(3D-SiC)錶麵浸塗γ-AlOOH溶膠,採用不同燒結製度在3D-SiC錶麵生成瞭Al_2O_3薄膜.採用X射線衍射儀(XRD)、紅外光譜儀(IR)和掃描電子顯微鏡(SEM)分析瞭薄膜的物相和顯微結構,併檢測瞭薄膜的抗熱震性.結果錶明,採用真空浸漬法在3D-SiC錶麵浸塗加入濃度0.22mol/L HNO_3製備的γ-AlOOH溶膠能燒結形成緻密平整的Al_2O_3薄膜.升高燒結溫度,Al_2O_3晶粒長大,900℃時薄膜最緻密且能觀測到玻璃態顯微結構.薄膜的抗熱震性隨燒結溫度升高而提高.
이무궤염Al(NO_3)_3·9H_2O위선구체、수위용제,가입불동농도적효용제HNO_3,채용용효-응효(Solgel)법제비료발모석(γ-AlOOH)용효.분별이용액하강법화진공침지법재삼유망락탄화규도자골가(3D-SiC)표면침도γ-AlOOH용효,채용불동소결제도재3D-SiC표면생성료Al_2O_3박막.채용X사선연사의(XRD)、홍외광보의(IR)화소묘전자현미경(SEM)분석료박막적물상화현미결구,병검측료박막적항열진성.결과표명,채용진공침지법재3D-SiC표면침도가입농도0.22mol/L HNO_3제비적γ-AlOOH용효능소결형성치밀평정적Al_2O_3박막.승고소결온도,Al_2O_3정립장대,900℃시박막최치밀차능관측도파리태현미결구.박막적항열진성수소결온도승고이제고.
The preparation process of Al_2O_3 thin film is represented by the sol-gel method, in which Al(NO_3)_3·9H_2O is used as precusor, water and HNO_3 as solvent and peptizing agent, respectively. Dip-coating and vacuum impregnation methods are used to coat γ-AlOOH sol solution on three-dimensional silicon carbide sintered at different temperature to form Al_2O_3 thin film. X-ray diffraction(XRD), infrared spectrometry(IR), scanning electronic microscope(SEM) are used to study the mierostrueture and phase constitution of the film. The investigation clearly shows that the thin film which prepared from γ-AlOOH sol solution added 0.22mol/L HNO_3 with vacuum impregnation method, is coated on three-dimensional silicon carbide perfectly. The grain of Al_2O_3 increases with the sintering temperature increasing. The thin film is full density at 900℃, and the glass microstructure is observed. The thermal shock resistance of the Al_2O_3 thin film increases with the sintering temperature increasing.