稀土学报(英文版)
稀土學報(英文版)
희토학보(영문판)
JOURNAL OF RARE EARTHS
2003年
1期
19-22
,共4页
何大伟%杨胜%关亚菲%权善玉%王永生%徐叙瑢
何大偉%楊勝%關亞菲%權善玉%王永生%徐敘瑢
하대위%양성%관아비%권선옥%왕영생%서서용
luminescence%rf magnetron sputtering%electron-beam evaporation%electroluminescence%rare earths
The electroluminescence of ZnS doped with terbium fluoride thin films prepared by radio frequency magnetron sputtering method was reported. The characteristics of the ZnS∶TbF3 thin film electroluminescence devices, such as film characteristics of the ZnS∶Tb active layer, substrate temperatures during magnetron sputtering and Tb concentration of the active layer, were systematically investigated. The results show that annealing can evidently improve the luminescence performance of the luminescence device.
