材料科学与工程学报
材料科學與工程學報
재료과학여공정학보
MATERIALS SCIENCE AND ENGINEERING
2007年
4期
514-518
,共5页
刘春梅%李明伟%陈淑仙
劉春梅%李明偉%陳淑仙
류춘매%리명위%진숙선
热应力%LEFZ法%GaAs晶体%微重力
熱應力%LEFZ法%GaAs晶體%微重力
열응력%LEFZ법%GaAs정체%미중력
thermal stress%LEFZ method%GaAs crystal%microgravity
用有限元法对微重力环境下液封浮区(LEFZ)法生长的3英寸GaAs单晶中的热应力进行求解.假设晶体处于准定常状态且为轴对称的各向同性线弹性体.分析了液封厚度、晶体和进料棒转速对晶体中热应力分布的影响.
用有限元法對微重力環境下液封浮區(LEFZ)法生長的3英吋GaAs單晶中的熱應力進行求解.假設晶體處于準定常狀態且為軸對稱的各嚮同性線彈性體.分析瞭液封厚度、晶體和進料棒轉速對晶體中熱應力分佈的影響.
용유한원법대미중력배경하액봉부구(LEFZ)법생장적3영촌GaAs단정중적열응력진행구해.가설정체처우준정상상태차위축대칭적각향동성선탄성체.분석료액봉후도、정체화진료봉전속대정체중열응력분포적영향.
The thermal stress calculation for a 3 inch diameter gallium arsenide crystal grown by liquid encapsulation full floating zone(LEFZ) method under microgravity has been conducted by using the finite element numerical method. The crystal is assumed to be in a pseudo-steady axisymmetric state and to behave as isotropic linearly elastic body. The effect of the thickness of the encapsulant and the rotation rate of crystal and feed rod on the thermal stress is analyzed.
