半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2002年
6期
632-636
,共5页
江晓清%李柏阳%杨建义%王明华
江曉清%李柏暘%楊建義%王明華
강효청%리백양%양건의%왕명화
列阵波导光栅(AWG)%密集波分复用(DWDM)%波导镜%偏振补偿PACC:4280L%5270G%4280S%4282
列陣波導光柵(AWG)%密集波分複用(DWDM)%波導鏡%偏振補償PACC:4280L%5270G%4280S%4282
렬진파도광책(AWG)%밀집파분복용(DWDM)%파도경%편진보상PACC:4280L%5270G%4280S%4282
AWG%DWDM%waveguide mirror%polarization compensation
给出一种基于SOI材料结构紧凑的新颖AWG器件,它是将一个全内反射波导镜插入原波导阵列中间,并且利用全内反射时产生的相位差进行TE、TM模偏振补偿的方法,该器件具有尺寸小、制作工艺简单等特点.同时,给出一些实验结果,实验结果证实这种结构的AWG器件是可行的.
給齣一種基于SOI材料結構緊湊的新穎AWG器件,它是將一箇全內反射波導鏡插入原波導陣列中間,併且利用全內反射時產生的相位差進行TE、TM模偏振補償的方法,該器件具有呎吋小、製作工藝簡單等特點.同時,給齣一些實驗結果,實驗結果證實這種結構的AWG器件是可行的.
급출일충기우SOI재료결구긴주적신영AWG기건,타시장일개전내반사파도경삽입원파도진렬중간,병차이용전내반사시산생적상위차진행TE、TM모편진보상적방법,해기건구유척촌소、제작공예간단등특점.동시,급출일사실험결과,실험결과증실저충결구적AWG기건시가행적.
Arrayed-waveguide grating (AWG) device,a novel compact-structure,is presented based on silicon-on-insulator (SOI) material.A total internal reflection (TIR) waveguide mirror is fabricated at the middle of each arrayed waveguide.An approach of compensating TE-TM mode polarization is presented by using the phase difference,which is caused by TIR at the waveguide mirror.This AWG device has advantage for its small size and simple technigue of fabrication.The experimental results are given and the feasibility of fabrication is tested.