CAJ | 학술논문

介绍了气动测量中常用反射式和背压式气动传感器的设计与工作原理.理论分析出提高气动传感器灵敏度和测量范围的方法;通过对影响测量精度主要误差因素的分析,给出相应误差补偿的方法.所研制气动传感器的测量范围为55μm,分辨力为0.02μm,静态误差小于0.25μm,可适用于高精度高分辨力的非接触尺寸测量.
개소료기동측량중상용반사식화배압식기동전감기적설계여공작원리.이론분석출제고기동전감기령민도화측량범위적방법;통과대영향측량정도주요오차인소적분석,급출상응오차보상적방법.소연제기동전감기적측량범위위55μm,분변력위0.02μm,정태오차소우0.25μm,가괄용우고정도고분변력적비접촉척촌측량.
This paper presents the design and working principle of reflective and back pressure pneumatic sensor.The meth-ods which can improve the sensitivity and measurement range of pneumatic sensor are obtained by means of theory. The affection factors of measurement precision are discussed, and the corresponding methods are adopted to compensate the errors. The mea-surement range of developed pneumatic sensor is about 55μm, with 0.02μm in resolution and less than 0.25μm in static error.Therefore, pneumatic measurement technology can be used in high accuracy, high resolution and non-contact dimension measure-ment.