CAJ | 학술논문

MgZnO合金具有可覆盖日盲紫外波段的禁带宽度和晶格匹配的单晶衬底,是理想的日盲紫外探测材料.由于MgO和ZnO分属立方相和六角相,分相问题使高质量单一相MgZnO难以获得.热处理是提高薄膜结晶质量的有效手段.利用MOCVD方法制备了单一立方相Mg0.57Zn0.43O合金薄膜,研究了薄膜的退火行为对薄膜结构和光学性能的影响.研究发现,450℃的原生样品经过550,650,750,850℃氧气氛退火后,薄膜的结晶特性和表面形貌得到明显的改善.随着退火温度的增加,薄膜吸收截止边逐渐蓝移,带隙展宽.X光电子能谱分析发现,随着退火温度增加,Zn含量逐渐减小,这种现象被归结为组分蒸汽压的差异.在退火温度达到950℃时,样品发生了分相,出现了低Mg含量的六角相MgZnO.
MgZnO합금구유가복개일맹자외파단적금대관도화정격필배적단정츤저,시이상적일맹자외탐측재료.유우MgO화ZnO분속립방상화륙각상,분상문제사고질량단일상MgZnO난이획득.열처리시제고박막결정질량적유효수단.이용MOCVD방법제비료단일립방상Mg0.57Zn0.43O합금박막,연구료박막적퇴화행위대박막결구화광학성능적영향.연구발현,450℃적원생양품경과550,650,750,850℃양기분퇴화후,박막적결정특성화표면형모득도명현적개선.수착퇴화온도적증가,박막흡수절지변축점람이,대극전관.X광전자능보분석발현,수착퇴화온도증가,Zn함량축점감소,저충현상피귀결위조분증기압적차이.재퇴화온도체도950℃시,양품발생료분상,출현료저Mg함량적륙각상MgZnO.
Annealing behavior for cubic-phase Mg0.57Zn0.43 O thin films grown at 450℃ by metal-organic chemical vapor deposition were studied.After annealed at 550,650,750 and 850℃ in oxygen atmospheres,the crystal quality and surface smoothness of the thin films were improved significantly.Their bandgap shifts continuously to the higher energy the increasing annealing temperature.Confirmed by energy dispersive X-ray spectra,the enlarged bandgap was caused by the decrease of Zn content during annealing.Phase separation of the Mg0.57 Zn0.43 O films with significant surface roughening can also be observed during annealing at 950℃.