CAJ | 학술논문

降低自旋阀薄膜矫顽力对于制作巨磁电阻(GMR)传感器非常重要.报告了利用退火方法降低自旋阀薄膜矫顽力的实验结果,介绍了数值模拟退火的条件和方法,借助计算机对退火实验的条件及其实验结果进行了模拟.结果表明,模拟后的结果可以用来进一步优化退火条件,并不再需要做大量退火实验.使用优化后的退火条件大大降低了自旋阀薄膜的矫顽力同时可保持自旋阀的磁电阻变化率(MR)在较高的水平.介绍了不同退火参数下的模拟实验,结果显示退火前样品的的矫顽力为358.2 A/m、MR为9.24%,退火后其分别降到3.18 A/m和8.54%,表明数值模拟方法可以较好地拟合自旋阀薄膜的退火条件及实验结果,并有助于优化退火条件.
강저자선벌박막교완력대우제작거자전조(GMR)전감기비상중요.보고료이용퇴화방법강저자선벌박막교완력적실험결과,개소료수치모의퇴화적조건화방법,차조계산궤대퇴화실험적조건급기실험결과진행료모의.결과표명,모의후적결과가이용래진일보우화퇴화조건,병불재수요주대량퇴화실험.사용우화후적퇴화조건대대강저료자선벌박막적교완력동시가보지자선벌적자전조변화솔(MR)재교고적수평.개소료불동퇴화삼수하적모의실험,결과현시퇴화전양품적적교완력위358.2 A/m、MR위9.24%,퇴화후기분별강도3.18 A/m화8.54%,표명수치모의방법가이교호지의합자선벌박막적퇴화조건급실험결과,병유조우우화퇴화조건.
To reduce the hysteresis of spin valve films is important for fabricating Giant Magnetore sistance(GMR) sensors. This paper reports the experiment results of reducing hysteresis of the spin valve films by using an annealing method and describes numerically simulating annealing conditions and methods. By utilizing the method of numerical simulating, the annealing conditions and experiment results are simulated. The simulating results show that the numerical simulating can not only optimize annealing conditions, but also decrease a large numbers annealing experiments. Using optimized annealing conditions, the coercive force of the spin-valve film is reduced enormously but the Magnetore sistance(MR) of the spin-valve film can be kept a higher level. An annealing experiment and different annealing parameters show that the coercive force andMR of the spin-valve film respectively is 358.2 A/m and 9.24% before annealing, but they have increased to 3.18 A/m and 8.54% after annealings,which proves the numerical simulating method is conductive to the improvement of the annealing conditions.