CAJ | 학술논문

用慢正电子束辅助以拉曼光谱方法对一批较高质量的PECVD金刚石膜的微结构进行测量研究.拉曼光谱实验结果显示,这批金刚石膜中金刚石相含量比较高,正电子湮没实验进一步从微观结构上指出各个金刚石膜之间存在很大差异,并且从缺陷角度发现各样品中缺陷尺寸和缺陷浓度不一样,造成膜质量不同.S-E曲线变化趋势反映出各样品金刚石晶体结构存在明显不同.这表明正电子湮没技术是测量金刚石膜微结构的有力手段.
용만정전자속보조이랍만광보방법대일비교고질량적PECVD금강석막적미결구진행측량연구.랍만광보실험결과현시,저비금강석막중금강석상함량비교고,정전자인몰실험진일보종미관결구상지출각개금강석막지간존재흔대차이,병차종결함각도발현각양품중결함척촌화결함농도불일양,조성막질량불동.S-E곡선변화추세반영출각양품금강석정체결구존재명현불동.저표명정전자인몰기술시측량금강석막미결구적유력수단.
The microstructure of diamond films was studied by slow positron beam and Raman spectroscopy. For the Raman spectroscopy experiment on diamond films, a high fraction of the sp3 hybridized bond was detected in samples. Positron annihilation spectra analysis further illuminated that the concentration and types of defects were different in each sample. S-E curves of all samples showed that diamond crystal structures had obvious variation in each sample. These results indicated that positron annihilation spectroscopy was an effective means to measure microstructure of diamond films.