CAJ | 학술논문

设计了一种新型静电驱动双向平动的MEMS变形镜,其结构包括3部分:中央下电极,4个静电驱动杠杆结构以及反射镜面(上电极).该变形镜有两种驱动模式:向下驱动模式和向上驱动模式.在向上驱动时,4个杠杆结构实现了位移的放大；向下驱动时,利用了非线性弹性系数法扩展了镜面的平动范围.采用表面硅工艺完成了变形镜的加工.通过白光干涉仪对变形镜的测试表明:在向上驱动模式下,变形镜在驱动电压为31V时位移达到1.1 μm；在向下驱动模式下,变形镜在6V的驱动电压下位移达到1.1μm.变形镜的总行程为2.2 μm,达到了同样工艺下传统变形镜的3倍左右.
설계료일충신형정전구동쌍향평동적MEMS변형경,기결구포괄3부분:중앙하전겁,4개정전구동강간결구이급반사경면(상전겁).해변형경유량충구동모식:향하구동모식화향상구동모식.재향상구동시,4개강간결구실현료위이적방대；향하구동시,이용료비선성탄성계수법확전료경면적평동범위.채용표면규공예완성료변형경적가공.통과백광간섭의대변형경적측시표명:재향상구동모식하,변형경재구동전압위31V시위이체도1.1 μm；재향하구동모식하,변형경재6V적구동전압하위이체도1.1μm.변형경적총행정위2.2 μm,체도료동양공예하전통변형경적3배좌우.
A novel electrostatic micro-electro-mechanical-system(MEMS) deformable mirror with the ability of bidirectional translation was presented.The micro mirror consisted of three parts:a central bottom electrode,four electrostatic lever-actuators and an upper electrode,i.e.a mirror plate.The mirror can operate in upward and downward modes.In the upward mode,the displacement of the mirror plate was amplified by using four levers; while in the downward mode,a nonlinear spring method was adopted to extend the translation range.The micro mirror was fabricated by using surface micromachining process and tested by a white light interferometer.The experimental results showed that the mirror could move upward about 1.1 μm at 31 V,and downward 1.1 μm at 6 V.The total displacement of the mirror plate reached 2.2 μm,about 3 times as large as the stroke of traditional mirrors with the same fabrication process.