CAJ | 학술논문

光杠杆法是原子力显微镜(AFM)悬臂定位的主要方法.由于悬臂自身的尺寸和材料特性、检测光路系统等因素制约,悬臂弯曲测量时存在光泄露.被试样表面反射的部分泄露光与悬臂反射光产生干涉,在探针-试样接近曲线中产生光干涉误差.基于轻触模式AFM,分析了光干涉误差的产生原因,并对其引起的AFM测量误差进行了数学分析和仿真、提出了减小光干涉误差的方法.实验结果和理论分析表明,为了进一步提高AFM的测量精度,有必要克服定位系统中的光干涉误差.
광강간법시원자력현미경(AFM)현비정위적주요방법.유우현비자신적척촌화재료특성、검측광로계통등인소제약,현비만곡측량시존재광설로.피시양표면반사적부분설로광여현비반사광산생간섭,재탐침-시양접근곡선중산생광간섭오차.기우경촉모식AFM,분석료광간섭오차적산생원인,병대기인기적AFM측량오차진행료수학분석화방진、제출료감소광간섭오차적방법.실험결과화이론분석표명,위료진일보제고AFM적측량정도,유필요극복정위계통중적광간섭오차.
Optical lever method is a main technique to detect the cantilevers position in atomic force microscope (AFM). Due to the limitations of cantilevers dimensions, characteristics of cantilever material and detecting optical system, the leakage of detecting light exists in the cantilevers positioning system. Some leaked light scattered by sample surface interferences with the light reflected by the cantilever. Therefore, an optical interference error occurs in the probe-sample approaching curve. Based on the tapping mode AFM, the factors causing the optical interference error are analyzed;the AFM measurement errors caused by the optical interference are deduced mathematically and simulated;several methods are put forwards to reduce the error. Experimental results and theoretical analysis show that in order to improve the measurement accuracy of AFM, it is necessary to overcome the optical interference error in the cantilevers positioning system.