纳米技术与精密工程
納米技術與精密工程
납미기술여정밀공정
NANOTECHNOLOGY AND PRECISION ENGINEERING
2005年
4期
307-313
,共7页
高伟%GENDA Satoshi%KUDO Yasuto%KIYONO Satoshi%Patten A John
高偉%GENDA Satoshi%KUDO Yasuto%KIYONO Satoshi%Patten A John
고위%GENDA Satoshi%KUDO Yasuto%KIYONO Satoshi%Patten A John
测量%精密仪器%传感器%纳米加工%高速工具控制%力传感器
測量%精密儀器%傳感器%納米加工%高速工具控製%力傳感器
측량%정밀의기%전감기%납미가공%고속공구공제%력전감기
measurement%precision instrument%sensor%nanofabrication%fast tool control%force sensor
给出了一种用于复杂表面形状精密纳米加工的探针装置.该探针由一个高速可控的金刚石切割单元(FTC单元)和一个高灵敏度的压电式力传感器组成.而FTC单元由一个单点金刚石切割工具和一个压电陶瓷晶体(PZT)驱动器构成.压电陶瓷晶体(PZT)驱动器可对与切削量相对应的金刚石工具的Z向位置进行高速控制,从而实现加工复杂表面形状的目的.加工中的切削力是反映切削进程的重要指标,可由联结于FTC单元的高灵敏度力传感器进行测量.比对了用于联结力传感器和FTC单元的两种设计方法.
給齣瞭一種用于複雜錶麵形狀精密納米加工的探針裝置.該探針由一箇高速可控的金剛石切割單元(FTC單元)和一箇高靈敏度的壓電式力傳感器組成.而FTC單元由一箇單點金剛石切割工具和一箇壓電陶瓷晶體(PZT)驅動器構成.壓電陶瓷晶體(PZT)驅動器可對與切削量相對應的金剛石工具的Z嚮位置進行高速控製,從而實現加工複雜錶麵形狀的目的.加工中的切削力是反映切削進程的重要指標,可由聯結于FTC單元的高靈敏度力傳感器進行測量.比對瞭用于聯結力傳感器和FTC單元的兩種設計方法.
급출료일충용우복잡표면형상정밀납미가공적탐침장치.해탐침유일개고속가공적금강석절할단원(FTC단원)화일개고령민도적압전식력전감기조성.이FTC단원유일개단점금강석절할공구화일개압전도자정체(PZT)구동기구성.압전도자정체(PZT)구동기가대여절삭량상대응적금강석공구적Z향위치진행고속공제,종이실현가공복잡표면형상적목적.가공중적절삭력시반영절삭진정적중요지표,가유련결우FTC단원적고령민도력전감기진행측량.비대료용우련결력전감기화FTC단원적량충설계방법.
This paper describes a probe for precision nanofabrication of complex surfaces. The probe is composed of a fast tool controll diamond cutting unit (FTC-unit) and a highly sensitive piezoelectric force sensor. The FTC-unit consists of a single point diamond cutting tool and a PZT actuator. Complex surfaces can be generated through fast control of the Z-position of the tool, which corresponds to the depth of cut, by the PZT actuator. The cutting force, which is an important factor reflecting the condition of the cutting process, is detected by the force sensor coupled into the FTC-unit. Two structures for coupling the force sensor to the FTC-unit are designed and compared.
