电子元件与材料
電子元件與材料
전자원건여재료
ELECTRONIC COMPONENTS & MATERIALS
2010年
2期
11-13
,共3页
汪婧妍%高兆芬%潘庆谊%徐甲强
汪婧妍%高兆芬%潘慶誼%徐甲彊
왕청연%고조분%반경의%서갑강
In_2O_3空心球%溶剂热–退火反应法%气敏元件%NO_2
In_2O_3空心毬%溶劑熱–退火反應法%氣敏元件%NO_2
In_2O_3공심구%용제열–퇴화반응법%기민원건%NO_2
In_2O_3 hollow sphere%solvothermal-annealing reaction method%gas sensor%NO_2
采用溶剂热–退火反应法合成了氧化铟空心球.所获空心球用XRD,TEM和SEM等表征.发现所合成的氧化铟空心球直径介于0.5～1.0 μm,且该空心球是由粒径约50 nm的氧化铟纳米块堆积而成.研究了用此空心球制备的气敏元件的气敏性能.结果表明,氧化铟空心球结构有益于提高元件的响应性能.此外,该元件对NO_2气体有较快的响应(8 s)并且恢复时间较短(15 s).
採用溶劑熱–退火反應法閤成瞭氧化銦空心毬.所穫空心毬用XRD,TEM和SEM等錶徵.髮現所閤成的氧化銦空心毬直徑介于0.5～1.0 μm,且該空心毬是由粒徑約50 nm的氧化銦納米塊堆積而成.研究瞭用此空心毬製備的氣敏元件的氣敏性能.結果錶明,氧化銦空心毬結構有益于提高元件的響應性能.此外,該元件對NO_2氣體有較快的響應(8 s)併且恢複時間較短(15 s).
채용용제열–퇴화반응법합성료양화인공심구.소획공심구용XRD,TEM화SEM등표정.발현소합성적양화인공심구직경개우0.5～1.0 μm,차해공심구시유립경약50 nm적양화인납미괴퇴적이성.연구료용차공심구제비적기민원건적기민성능.결과표명,양화인공심구결구유익우제고원건적향응성능.차외,해원건대NO_2기체유교쾌적향응(8 s)병차회복시간교단(15 s).
In_2O_3 hollow spheres were synthesized via a solvothermal-annealing reaction method.Obtained hollow spheres were characterized through XRD, TEM and SEM.The results indicate that the as-synthesized In_2O_3 possesses hollow spherical structure with diameters of 0.5~1.0 μm which is assembled by In_2O_3 nanocubes in particle size of about 50 nm.The gas sensing properties of the gas sensor fabricated from as-synthesized In_2O_3 hollow spheres were investigated.The results reveal that the hollow spherical structure of In_2O_3 can help to enhance the response property of the gas sensor.Next, the gas sensor has high sensitivity to NO_2.And the times of response and recovery are 8 s and 15 s, respectively.
