半导体学报
半導體學報
반도체학보
CHINESE JOURNAL OF SEMICONDUCTORS
2004年
8期
913-917
,共5页
杨笛%夏金松%余金中%陈少武%刘忠立
楊笛%夏金鬆%餘金中%陳少武%劉忠立
양적%하금송%여금중%진소무%류충립
光斑转换器%脊型楔变波导%耦合损耗
光斑轉換器%脊型楔變波導%耦閤損耗
광반전환기%척형설변파도%우합손모
spot-size converter%tapered rib waveguide%coupling loss
为了提高硅基上单模波导器件与单模光纤的耦合效率和工艺容差,设计了一种实用新型光斑转换器,它由水平和垂直双向楔变的波导芯区和双内包层构成.分析了内包层折射率与其厚度对耦合效率的影响,发现通过优化内包层的参数可以加强对扩展光场的限制.针对在硅基上制作垂直楔变结构的波导还很困难的情况,提出了一种低成本、简单可行的制作方法.
為瞭提高硅基上單模波導器件與單模光纖的耦閤效率和工藝容差,設計瞭一種實用新型光斑轉換器,它由水平和垂直雙嚮楔變的波導芯區和雙內包層構成.分析瞭內包層摺射率與其厚度對耦閤效率的影響,髮現通過優化內包層的參數可以加彊對擴展光場的限製.針對在硅基上製作垂直楔變結構的波導還很睏難的情況,提齣瞭一種低成本、簡單可行的製作方法.
위료제고규기상단모파도기건여단모광섬적우합효솔화공예용차,설계료일충실용신형광반전환기,타유수평화수직쌍향설변적파도심구화쌍내포층구성.분석료내포층절사솔여기후도대우합효솔적영향,발현통과우화내포층적삼수가이가강대확전광장적한제.침대재규기상제작수직설변결구적파도환흔곤난적정황,제출료일충저성본、간단가행적제작방법.
A novel structure of spot-size converter is designed to allow low loss and large alignment tolerance between single-mode rib waveguide devices and fiber arrays theoretically. The spot-size converter consists of a tapered rib core region and a double-cladding region. Through optimizing parameters,an expanded mode field can be tightly confined in the inner cladding and thus radiation loss be reduced largely at the tapered region. The influence of refractive index and thickness of the inner cladding on coupling loss is analyzed in particular. A novel,easy method of fabricating tapered rib spot-size converter based on silicon-on-insulator material is proposed.