CAJ | 학술논문

为消除干涉仪标准参考面的误差,保证其测量准确度,本文采用液面基准法建立光学平面基准对仪器的系统误差进行标定.首先建立弯曲静液面动力学方程从理论上分析润湿效应对液面平面度的影响,并结合实验分析气流、温度、震动等环境因素对液面稳定性的影响,讨论波面稳定性评价指标,给予实验验证.最后用建立的大液面基准对干涉仪系统误差进行标定,给出标定结果.
위소제간섭의표준삼고면적오차,보증기측량준학도,본문채용액면기준법건립광학평면기준대의기적계통오차진행표정.수선건립만곡정액면동역학방정종이론상분석윤습효응대액면평면도적영향,병결합실험분석기류、온도、진동등배경인소대액면은정성적영향,토론파면은정성평개지표,급여실험험증.최후용건립적대액면기준대간섭의계통오차진행표정,급출표정결과.
Through absolute liquid reference method,the bend static liquid surface dynamics equation is built for calibrating the system error of interferometer,and theoretical simulation and experimental measurement are carried out for wetting effect on liquid surface.The stability of liquid surface effected by the environment factors such as air current,temperature,vibration,is analyzed,the experiment is taken,and estimate indexes are given.The absolute liquid reference with high-accuracy is set for calibrating interferometer system error under laboratory environment,the results are given,and the measurement accuracy is ensured.