光学精密工程
光學精密工程
광학정밀공정
OPTICS AND PRECISION ENGINEERING
2008年
12期
2378-2383
,共6页
李龙土%邬军飞%褚祥诚%季叶
李龍土%鄔軍飛%褚祥誠%季葉
리룡토%오군비%저상성%계협
压电双晶片%有限元法%PZT%偏转位移
壓電雙晶片%有限元法%PZT%偏轉位移
압전쌍정편%유한원법%PZT%편전위이
piezoelectric bimorph%Finite Element Method(FEM)%PZT%tipdeflection
采用有限元分析方法,分析了压电双晶片悬臂梁的位移形变特征.研究了金属弹性层、压电陶瓷片的材料属性及几何尺寸对双晶片偏转位移的影响;计算了双晶片的弹性模量、厚度以及加载电压与位移形变产生弯应力的关系;通过位移测试、弯应力测试等相关实验对有限元分析进行了验证.当加载电压为60 V(120 Vp-p)时,双晶片的偏转位移和弯应力分别为166/μm和34.7 m·N,实验结果证明本文所建的有限元模型是合理有效的.此外,测试了压电双晶片的振动特性,测得其谐振频率为310 Hz,在该频率下加载20 Vp-p电压,其端部位移输出即可达1.7 mm.有限元分析结果及实验验证为压电双晶片结构的优化设计提供了依据.
採用有限元分析方法,分析瞭壓電雙晶片懸臂樑的位移形變特徵.研究瞭金屬彈性層、壓電陶瓷片的材料屬性及幾何呎吋對雙晶片偏轉位移的影響;計算瞭雙晶片的彈性模量、厚度以及加載電壓與位移形變產生彎應力的關繫;通過位移測試、彎應力測試等相關實驗對有限元分析進行瞭驗證.噹加載電壓為60 V(120 Vp-p)時,雙晶片的偏轉位移和彎應力分彆為166/μm和34.7 m·N,實驗結果證明本文所建的有限元模型是閤理有效的.此外,測試瞭壓電雙晶片的振動特性,測得其諧振頻率為310 Hz,在該頻率下加載20 Vp-p電壓,其耑部位移輸齣即可達1.7 mm.有限元分析結果及實驗驗證為壓電雙晶片結構的優化設計提供瞭依據.
채용유한원분석방법,분석료압전쌍정편현비량적위이형변특정.연구료금속탄성층、압전도자편적재료속성급궤하척촌대쌍정편편전위이적영향;계산료쌍정편적탄성모량、후도이급가재전압여위이형변산생만응력적관계;통과위이측시、만응력측시등상관실험대유한원분석진행료험증.당가재전압위60 V(120 Vp-p)시,쌍정편적편전위이화만응력분별위166/μm화34.7 m·N,실험결과증명본문소건적유한원모형시합리유효적.차외,측시료압전쌍정편적진동특성,측득기해진빈솔위310 Hz,재해빈솔하가재20 Vp-p전압,기단부위이수출즉가체1.7 mm.유한원분석결과급실험험증위압전쌍정편결구적우화설계제공료의거.
The deformation of bimorph is analyzed by using the Finite Element Method(FEM).The influences of middle elastic beam and piezoelectric layer on the deflection actuator are studied.The correlations of the applied voltage,the elastic modulus of beam and the thickness of piezoelectric 1aver are analyzed quantitatively to provide a theoretical basis and design method for the bimorph actuators.The mechanical force derived from the bimorph deformation is also studied. Furthermore,experiments are carried out to validate the finite element model.The vilidation shows that the tip-deflection ment results demonstrate that the piezoelectric bimorph model used in this paper is feasible and effective.Moreover,the resonance property of the bimorph is measured by the polytec 300-F scanning vibrometer.The bimorph performs an exceeding deflection about 1.7 mm at the tip when it resonates at a frequency about 310 Hz under an alternating voltage of 20 Vp-p.These numerical and experimental results are useful to design and optimize the piezoelectric bimorph.