CAJ | 학술논문

对波长短于400 nm的紫外线有高灵敏度的探测器,在一些要求很高的可见光及红外线背景下作紫外线探测的应用是非常重要的.它们能在工业设备、科学研究以及消费产品开发新应用,例如火焰监控、光刻技术、紫外线天文学、各种各样的先进医学和生物学仪器以及多种用于个人的紫外线监控产品.最近,我们已成功开发2种Ⅱ-Ⅵ族紫外线探测器：它们分别是以ZnSSe及ZnMgS为基的检测器.它们已经在商品化阶段.投产的商品包括紫外手表、个人紫外线监测器、新概念玩具和应用于教育部门的紫外线指数仪表及紫外线透射测试仪.这份报告会对这些新型器件作出详细的技术回顾.讨论集中于最近的研究成果：(1)萧特基(schottky)金属的问题、(2)防反射镀薄层以及(3)噪音和灵敏度检测.我们已制备并探讨了Au/Ni和Au/Cr双层萧特基接触.研究结果显示这些器件的光响应曲线相对于用纯Au作萧特基接触的器件,具有较低的抗可见光能力.利用二次离子质谱(SIMS)分析技术,发现Ni和Cr在Ⅰ～Ⅵ族材料中有严重的扩散以及它们在蒸镀过程中较易氧化.而且,也发现Au/Cr接触有金属合金现象.提出了一个考虑到由金属扩散及合金产生缺陷态的模型.相信这些缺陷态通过光激发及隧穿机制,严重地影响了在可见光频谱的光响应.我们的原本器件已经拥有高达60％的外部量子效率,但仍然受限于由于反射而导致的损失.在这项报告中,将讨论利用单层和多层防反射镀薄层的最新成果,也会探讨器件系统的灵敏度.我们已测量了器件的嗓音频谱密度、响应时间、频宽、光响应、在反向偏压下的暗电流及零偏压下的电阻.高达1014cm Hz1/2W-1的灵敏度已经达到.这些结果显示我们研制的新型紫外线探测器也适合于多种高档的应用,例如火焰传感器和紫外线照像机.
대파장단우400 nm적자외선유고령민도적탐측기,재일사요구흔고적가견광급홍외선배경하작자외선탐측적응용시비상중요적.타문능재공업설비、과학연구이급소비산품개발신응용,례여화염감공、광각기술、 자외선천문학、각충각양적선진의학화생물학의기이급다충용우개인적자외선감공산품.최근,아문이성공개발2충Ⅱ-Ⅵ족자외선탐측기：타문분별시이ZnSSe급ZnMgS위기적검측기.타문이경재상품화계단.투산적상품포괄자외수표、개인자외선감측기、신개념완구화응용우교육부문적자외선지수의표급자외선투사측시의.저빈보고회대저사신형기건작출상세적기술회고.토론집중우최근적연구성과：(1)소특기(schottky)금속적문제、(2)방반사도박층이급(3)조음화령민도검측.아문이제비병탐토료Au/Ni화Au/Cr쌍층소특기접촉.연구결과현시저사기건적광향응곡선상대우용순Au작소특기접촉적기건,구유교저적항가견광능력.이용이차리자질보(SIMS)분석기술,발현Ni화Cr재Ⅰ～Ⅵ족재료중유엄중적확산이급타문재증도과정중교역양화.이차,야발현Au/Cr접촉유금속합금현상.제출료일개고필도유금속확산급합금산생결함태적모형.상신저사결함태통과광격발급수천궤제,엄중지영향료재가견광빈보적광향응.아문적원본기건이경옹유고체60％적외부양자효솔,단잉연수한우유우반사이도치적손실.재저항보고중,장토론이용단층화다층방반사도박층적최신성과,야회탐토기건계통적령민도.아문이측량료기건적상음빈보밀도、향응시간、빈관、광향응、재반향편압하적암전류급령편압하적전조.고체1014cm Hz1/2W-1적령민도이경체도.저사결과현시아문연제적신형자외선탐측기야괄합우다충고당적응용,례여화염전감기화자외선조상궤.
Recently, we have succeeded in the development of two novel Ⅱ-Ⅵ systems for UV radiation detection.They are already in commercialization stage. In this report, a technical review on these novel devices were presented. We have fabricated and studied both Au/Ni and Au/Cr bilayer Schottky contacts in this work. The results of our studies show that the photoresponse curves of these devices suffer much lower visible rejection power as compared to devices with pure Au as Schottky contacts. With the help of the secondary ion mass spectroscopy technique, we have identified a serious diffusion of these metals into Ⅱ-Ⅵ materials, as well as their ease of oxidization during deposition. Furthermore, we also detected the metal alloying in the Au/Cr contact. A model was proposed in this work to take into account the defect states generated through metal diffusion and/or alloying. Our recent achievement using single layer and multilayer anti-reflection coatings to improve the external quantum efficiency was discussed. A noise and detectivity study on the device system was also presented. A detectivity as high as 7.1 × 10 14number of high-end applications.