CAJ | 학술논문

基于光固化快速成型制造技术，结合光刻技术、牺牲层技术以及化学镀膜技术，研究了一种新型的微细加工方法。提出了非导电极板（光敏树脂固化物）镀膜的新方案，设计了一种有较大驱动位移的微型电容式激励器，并介绍了其加工制作的工艺流程。实验结果表明此微细加工方法是可行的，从而开辟了微细加工的新途径。
기우광고화쾌속성형제조기술，결합광각기술、희생층기술이급화학도막기술，연구료일충신형적미세가공방법。제출료비도전겁판（광민수지고화물）도막적신방안，설계료일충유교대구동위이적미형전용식격려기，병개소료기가공제작적공예류정。실험결과표명차미세가공방법시가행적，종이개벽료미세가공적신도경。
Based on the photo-curing rapid prototyping technology and in combination with the light photo-etching technolo gy, and sacrificial layer technology as well as electro-less plating technology , a new method of micro fabrication is developed, and a new programme of electro -less plating is suggested a capacitor micro actuator with big moving displac ement is designed and the fabricating method for actuator is described. The expe riment results indicate that the micro-fabrication process is feasible whereby blazing a new way for micro-fabrication.