应用科学学报
應用科學學報
응용과학학보
JOURNAL OF APPLIED SCIENCES
2010年
2期
158-162
,共5页
计量学%触发式测头%光纤布喇格光栅%自解调法%触发原理
計量學%觸髮式測頭%光纖佈喇格光柵%自解調法%觸髮原理
계량학%촉발식측두%광섬포나격광책%자해조법%촉발원리
metrology%touch trigger probe%fiber Bragg grating%self-demodulation%trigger principle
光纤布喇格光栅触发式测头是一种新型测头.传感信号解调是光纤光栅作为敏感元件应用于测头的关键技术之一.在光功率与波长漂移量函数关系的基础上,借助双频激光干涉仪、纳米级的微动平台对试制的测头进行FBG自解调实验.结果表明,研制的测头分辨率达到100nm,验证了光纤布喇格光栅应用于触发式测头的可行性.
光纖佈喇格光柵觸髮式測頭是一種新型測頭.傳感信號解調是光纖光柵作為敏感元件應用于測頭的關鍵技術之一.在光功率與波長漂移量函數關繫的基礎上,藉助雙頻激光榦涉儀、納米級的微動平檯對試製的測頭進行FBG自解調實驗.結果錶明,研製的測頭分辨率達到100nm,驗證瞭光纖佈喇格光柵應用于觸髮式測頭的可行性.
광섬포나격광책촉발식측두시일충신형측두.전감신호해조시광섬광책작위민감원건응용우측두적관건기술지일.재광공솔여파장표이량함수관계적기출상,차조쌍빈격광간섭의、납미급적미동평태대시제적측두진행FBG자해조실험.결과표명,연제적측두분변솔체도100nm,험증료광섬포나격광책응용우촉발식측두적가행성.
The touch trigger probe based on fiber Bragg gratings is a newly developed probe.With a sensing element used in a three-dimensional probe.sensor signal demodulation is a key technique.By means of the dual-frequency laser interferometer and nano-level stage.the sampling probe is tested using a self-demodulation approach based on the functional relations between optical power and wavelength shift.Resolution of more than 100 nm can be achieved from the analysis of experimental data on a developed probe.Furthermore,experiments verify that application of FBG sensors in a three-dimensional probe is feasible.
