CAJ | 학술논문

针对高精度非球面检测过程中,测量力对接触式传感器测头测量不确定度的影响问题,本文在建立接触式测头简化结构模型的基础上,分析建立了测杆倾斜、滑动以及弯曲变形对测量精度的影响模型.并通过仿真分析得出了高精度非球面测量过程中接触式测头受非球面相对口径等的影响规律,即,其中测杆的弯曲变形是测量力影响的主要分量.为进一步提高接触式测量的精度奠定了基础.
침대고정도비구면검측과정중,측량력대접촉식전감기측두측량불학정도적영향문제,본문재건립접촉식측두간화결구모형적기출상,분석건립료측간경사、활동이급만곡변형대측량정도적영향모형.병통과방진분석득출료고정도비구면측량과정중접촉식측두수비구면상대구경등적영향규률,즉,기중측간적만곡변형시측량력영향적주요분량.위진일보제고접촉식측량적정도전정료기출.
The effect of measurement force on the accuracy of an ultra-precise contact probe, is difficult to perform in the field of ultra-precise measurement of complex surfaces, especially aspheric measurement. A simplified structure model of contact probe was built. The effect of the slant, glide and bend of the contact probe was analyzed. The simulation indicates that the effect of bend of the contact probe is main.