CAJ | 학술논문

分析了投影栅相位法三维轮廓测量系统的非线性误差.建立了几何光学模型, 从理论上推导出被测点的相对高度与像点坐标的关系,研究了系统结构参数改变引起的高度误差的变化.详细阐述了像点坐标误差和系统非线性误差对系统精度的影响, 并给出了高度误差补偿方法.据此提出修正的非线性高度拟合公式, 实验结果证明新拟合公式的优越性.
분석료투영책상위법삼유륜곽측량계통적비선성오차.건립료궤하광학모형, 종이론상추도출피측점적상대고도여상점좌표적관계,연구료계통결구삼수개변인기적고도오차적변화.상세천술료상점좌표오차화계통비선성오차대계통정도적영향, 병급출료고도오차보상방법.거차제출수정적비선성고도의합공식, 실험결과증명신의합공식적우월성.
The non-linear error of three-dimensional profile measurement system is analyzed by projecting grating phase method. The geometric optics model is set up. The relation of measured points between relative height and image coordinate in theory are presumed. That a high degree of error change is caused by system structure parameters are studied. And the influence on system accuracy of image point coordinate error and system's non-linear error are analyzed in detail and some compensation approaches are provided in height. Then based on this, a modified height nonlinear fitting formula is provided. The superiority of the new fitting formula is proved by experiments.