CAJ | 학술논문

针对脉冲能量5～8 mJ的ArF准分子激光器,设计了基于可控硅开关结合三级磁脉冲压缩开关的全固态脉冲电源,采用国产可控硅和磁开关材料,获得了上升时间约150 ns,电压10～14 kV,传递能量0.35～0.68 J的激励脉冲,并实现了对准分子激光器快放电激励.三级磁开关总效率35%,分析表明磁开关损耗较大主要原因为电容能量转移不充分、导线铜损及磁芯材料铁损较大,并提出了相应改进办法.
침대맥충능량5～8 mJ적ArF준분자격광기,설계료기우가공규개관결합삼급자맥충압축개관적전고태맥충전원,채용국산가공규화자개관재료,획득료상승시간약150 ns,전압10～14 kV,전체능량0.35～0.68 J적격려맥충,병실현료대준분자격광기쾌방전격려.삼급자개관총효솔35%,분석표명자개관손모교대주요원인위전용능량전이불충분、도선동손급자심재료철손교대,병제출료상응개진판법.
A thyristor switched three-stage magnetic pulse compressor for ArF excimer laser was studied. This all solid state pulse power module can replace the commonly used thyratron switch. The thyristor and magnetic core used were both domestic products. The rise time of a high voltage pulse was compressed from 5 μs to 150 ns. Output energy of 0.35 J to 0.68 J and voltage of 10 kV to 14 kV were obtained. The energy transfer efficiency of the three-stage magnetic pulse compressor was 35%. At last, the reason for low efficiency was discussed and several measures were provided to improve the energy transfer efficiency.