传感器与微系统
傳感器與微繫統
전감기여미계통
TRANSDUCER AND MICROSYSTEM TECHNOLOGY
2009年
11期
34-36
,共3页
平面测量%正弦调制%柱面透镜%激光平面
平麵測量%正絃調製%柱麵透鏡%激光平麵
평면측량%정현조제%주면투경%격광평면
plane measurement%sine modulation%cylindrical lens%laser plane
针对高精度的大平面测量,构建了一种基于正弦调制的激光平面测量系统.该系统以激光器(LD)为光源,位置敏感探测器(PSD)为光电探测器,通过柱面透镜扩束获得测量基准平面--激光平面.分析了影响系统测量精度的主要因素,提出采用光源正弦调制的方法,以提高测量系统的抗干扰能力.实验结果表明:该系统具有较高的测量精度和输出稳定性.
針對高精度的大平麵測量,構建瞭一種基于正絃調製的激光平麵測量繫統.該繫統以激光器(LD)為光源,位置敏感探測器(PSD)為光電探測器,通過柱麵透鏡擴束穫得測量基準平麵--激光平麵.分析瞭影響繫統測量精度的主要因素,提齣採用光源正絃調製的方法,以提高測量繫統的抗榦擾能力.實驗結果錶明:該繫統具有較高的測量精度和輸齣穩定性.
침대고정도적대평면측량,구건료일충기우정현조제적격광평면측량계통.해계통이격광기(LD)위광원,위치민감탐측기(PSD)위광전탐측기,통과주면투경확속획득측량기준평면--격광평면.분석료영향계통측량정도적주요인소,제출채용광원정현조제적방법,이제고측량계통적항간우능력.실험결과표명:해계통구유교고적측량정도화수출은정성.
Aimed at high-precision measurement for large plane,a laser measurement system for plane based on sine modulation is presented.In this system,LD is used as the light source and projected onto a piece of cylindrical lens.With direct beam expanding,the cylindrical lens transmits a kind of sectorial laser plane,that is,the reference plane for the measurement system.The position of laser plane is then detected by PSD.Some factors influencing the system accuracy are analyzed.To reduce the error caused by those factors,the method of LD sine modulation is proposed.Calibration and stability test are carried out.The experimental results show that the measurement system is of high precision and high stability.