CAJ | 학술논문

室温下采用射频磁控溅射技术在涤纶纺粘非织造布表面沉积钴铁(CoFe)合金薄膜.通过原子力显微镜(AFM)观察了CoFe合金薄膜在无纺织布表面沉积的微观结构,并较为系统地分析了溅射时间、溅射压强及溅射功率对CoFe合金薄膜微观结构的影响.结果表明,磁控溅射的工艺参数配置对CoFe合金薄膜表面形貌的影响很大,溅射时间的长短、溅射功率的大小对成膜的均匀性有很大影响,在一定的溅射压强(0.5Pa)时合金颗粒将会因团聚而急速增大.
실온하채용사빈자공천사기술재조륜방점비직조포표면침적고철(CoFe)합금박막.통과원자력현미경(AFM)관찰료CoFe합금박막재무방직포표면침적적미관결구,병교위계통지분석료천사시간、천사압강급천사공솔대CoFe합금박막미관결구적영향.결과표명,자공천사적공예삼수배치대CoFe합금박막표면형모적영향흔대,천사시간적장단、천사공솔적대소대성막적균균성유흔대영향,재일정적천사압강(0.5Pa)시합금과립장회인단취이급속증대.
PET spun-bonded nonwoven fabric deposited with CoFe alloy thin films is prepared by RF(radio frequency) magnetron sputtering using CoFe alloy as the target and Ar(argon) as the working gas at room temperature.The mnicrostructures of CoFe alloy thin films deposited on the surface of PET fibers are analyzed by AFM(atomic force microscope).The effects of several RF sputtering parameters,such as sputtering time,sputtering pressure and sputtering power on microstructures of CoFe alloy thin films are investigated.It is shown that the configuration of sputtering parameters makes great influence on the morphology of CoFe alloy thin films.The sputtering time and sputtering power affect the uniformity of the thin films greatly.The size of CoFe alloy nanoparticles increases sharply when sputtering pressure is 0.5Pa because of agglomeration.