CAJ | 학술논문

用不同配方的Mn，Cr，Ti混合物涂复α-Al2O3绝缘瓷表面，在适当的条件下热处理，利用XPS和EELS测试分析了表面层的电子能态.发现在退火后各涂层成分的含量变化明显，由于配方元素不同程度地扩散、渗透进95Al2O3陶瓷基底内，通过反应生成了新相；根据价带谱和EELS分析，其表面层的价带顶移向真空能级，使能隙减小；能隙中的缺陷态、杂质态及表面态增加，有利于内次级电子的非弹性跃迁和二次电子发射系数的减小.
용불동배방적Mn，Cr，Ti혼합물도복α-Al2O3절연자표면，재괄당적조건하열처리，이용XPS화EELS측시분석료표면층적전자능태.발현재퇴화후각도층성분적함량변화명현，유우배방원소불동정도지확산、삼투진95Al2O3도자기저내，통과반응생성료신상；근거개대보화EELS분석，기표면층적개대정이향진공능급，사능극감소；능극중적결함태、잡질태급표면태증가，유리우내차급전자적비탄성약천화이차전자발사계수적감소.
The mixed coats of Mn, Ti and Cr are applied to α-Al2O3 insulator,and then the heat treatment in special conditions is followed. The electronic energy states of the surface are analysed by XPS and EELS. It is found that coats components changed obviously after annealing. The new phases are formed because coats penetrate into and mix with 95 ceramic a-A12O3. From the results of the valence-band XPS spectrum and EELS,it is suggested that the decrease of energy gaps is because their valence-band top moves towards vacuum level. The increase in density of defectstate, impurity state and surface state in energy gap is beneficial to non-elastic transition of internal secondary electron. And for the decrease in secondary electron emission coefficient.