CAJ | 학술논문

利用金属蒸气真空弧离子源，将大束流Nb离子注入到铝中，改善了铝表面的力学性能。在离子注入过程中直接形成了金属间化合物Al3Nb。金属间化合物的形成与离子注入的剂量有关。当Nb离子剂量达到3×1017ions／cm2时，Al3Nb相开始形成。随着注入剂量的增加，Al3Nb结晶的质量变好，当Nb离子剂量达到8×1017ions／cm2时，在铝的表面形成了约200 nm厚的金属化合物。随着注入剂量的增加，铝表面的硬度和弹性模量显著提高。当Nb离子剂量达到8×1017ions／cm2时，铝表面的硬度约为未注入样品的3倍，铝表面的弹性模量约是未注入样品的3倍。
이용금속증기진공호리자원，장대속류Nb리자주입도려중，개선료려표면적역학성능。재리자주입과정중직접형성료금속간화합물Al3Nb。금속간화합물적형성여리자주입적제량유관。당Nb리자제량체도3×1017ions／cm2시，Al3Nb상개시형성。수착주입제량적증가，Al3Nb결정적질량변호，당Nb리자제량체도8×1017ions／cm2시，재려적표면형성료약200 nm후적금속화합물。수착주입제량적증가，려표면적경도화탄성모량현저제고。당Nb리자제량체도8×1017ions／cm2시，려표면적경도약위미주입양품적3배，려표면적탄성모량약시미주입양품적3배。
The surface modification of Al films by high current Nb ion implantation with a metal vapor vacuum arc ion source was studied.The intermetallic compounds,Al3Nb,directly formed with Nb ion implantation into Al films with a current intensity of 9 mA to a dose of 3×1017 ions／cm2.The hardened aluminides layer,about 200 nm in thickness was obtained and with increasing the Nb ion dose the hardness of the Al surface could increase up to three times larger than that of the unimplanted one.Besides,the modulus of the Al surface were significantly increased by the aluminides.