一种紧缩型的SOI 3-dB多模干涉耦合器
일충긴축형적SOI 3-dB다모간섭우합기
Design and Fabrication of Ultracompact 3-dB MMI Coupler in Silicon-on-Insulator
  • 万方数据
    半导体学报 반도체학보
    CHINESE JOURNAL OF SEMICONDUCTORS
    2003年 2期 133-136 ,共4页

    严清峰%余金中%刘忠立

    엄청봉%여금중%류충립

    多模干涉耦合器%线锥形波导%SOI 多模榦涉耦閤器%線錐形波導%SOI
    다모간섭우합기%선추형파도%SOI
    multimode interference coupler%line tapered waveguide%silicon-on-insulator
    采用线锥形结构,在silicon-on-insulator (SOI)材料上设计并实现了一种新的紧缩型3-dB多模干涉耦合器(MMI).与普通的矩形结构3-dB MMI耦合器相比,该器件长度减少了40%.耦合器输出均衡度为1.3dB,过剩损耗为2.5dB.
    채용선추형결구,재silicon-on-insulator (SOI)재료상설계병실현료일충신적긴축형3-dB다모간섭우합기(MMI).여보통적구형결구3-dB MMI우합기상비,해기건장도감소료40%.우합기수출균형도위1.3dB,과잉손모위2.5dB.
    An ultracompact 3-dB coupler is designed and fabricated in silicon-on-insulator,based on 1×2 line tapered multimode interference (MMI) coupler.Comparing with the conventional straight MMI coupler,the device is ～40% shorter in length.The device exhibits uniformity of 1.3dB and excess loss of 2.5dB.
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