光电工程
光電工程
광전공정
OPTO-ELECTRONIC ENGINEERING
2010年
2期
133-136
,共4页
阶梯光栅%衍射效率%闪耀光栅%夫琅和费衍射
階梯光柵%衍射效率%閃耀光柵%伕瑯和費衍射
계제광책%연사효솔%섬요광책%부랑화비연사
step grating%diffraction efficiency%blazed gratings%Fraunhofer diffraction
衍射效率是评价二元光学器件质量性能的重要指标之一.针对反射性阶梯光栅,利用几何方法计算出斜入射情况下光束在台阶边缘的光程差的分布情况,根据多缝夫琅和费衍射推导出反射型阶梯光栅的衍射光强表达式.并在此基础上,讨论了台阶数N取2和N趋向于无穷两种极限情况下阶梯光栅光强公式的变化情况,得到区别于一般文献所表达的衍射效率公式.初步试验表明,反射型阶梯光栅的衍射效率与台阶数、蚀刻深度与入射波长的比值均有密切相关.
衍射效率是評價二元光學器件質量性能的重要指標之一.針對反射性階梯光柵,利用幾何方法計算齣斜入射情況下光束在檯階邊緣的光程差的分佈情況,根據多縫伕瑯和費衍射推導齣反射型階梯光柵的衍射光彊錶達式.併在此基礎上,討論瞭檯階數N取2和N趨嚮于無窮兩種極限情況下階梯光柵光彊公式的變化情況,得到區彆于一般文獻所錶達的衍射效率公式.初步試驗錶明,反射型階梯光柵的衍射效率與檯階數、蝕刻深度與入射波長的比值均有密切相關.
연사효솔시평개이원광학기건질량성능적중요지표지일.침대반사성계제광책,이용궤하방법계산출사입사정황하광속재태계변연적광정차적분포정황,근거다봉부랑화비연사추도출반사형계제광책적연사광강표체식.병재차기출상,토론료태계수N취2화N추향우무궁량충겁한정황하계제광책광강공식적변화정황,득도구별우일반문헌소표체적연사효솔공식.초보시험표명,반사형계제광책적연사효솔여태계수、식각심도여입사파장적비치균유밀절상관.
For binary optical elements, diffraction efficiency is one of the important performance indexes. Under the oblique incidence cases, the optical path difference of light beam distributed on the edge of steps can be calculated by using the geometric method. Then, according to the multi-slit Fraunhofer diffraction, the expression of diffraction intensity of reflection step grating is deduced. Under the two limit conditions that the number N of different steps changes from 2 to infinity, we discuss the expression of light intensity's change. In general case, we deduce the expression of diffraction efficiency which is different from that of other articles. Experimental results show that the step number and ratio between the etching depth and the light wavelength are closely associated with the diffraction efficiency of reflection step grating.
